Newport MKS Datasheets for Air Bearings
Air bearings use a thin film of pressurized air to support a load. They do not generate friction.
Air Bearings: Learn more
| Product Name | Notes |
|---|---|
| Newport's SinguLYS S-Series stage features ceramic components similar to those found in the DynamYX® and HybrYXTM families. The light-weight carriage with integrated pressure-vacuum elements is guided by a... | |
| The DynamYX® 300 Wafer Positioning Stage features a simple, 3-piece architecture in a two motor design that provides a cost effective solution for high accuracy and dynamic performance for... | |
| The DynamYX® Datum® air-bearing stage is the result of Newport’s continuous investment in advanced materials, proprietary manufacturing techniques, and meticulous structural analysis and design. Datum provides the accuracy... | |
| The DynamYX® GT air-bearing stage is intended for high-throughput applications with aggressive duty-cycles. Featuring an extremely rigid structure and high load capacity air bearings, it provides up to 2G... | |
| The DynamYX® RS Reticle Positioning Stage is designed for reticle inspection and repair applications. It features an extremely rigid ceramic reticle holder that is mounted to a single plane... | |
| The HybrYXTM single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. The HybrYX-G5 provides the advantages of... | |
| The HybrYXTM is a single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. HybrYX is well suited... | |
| The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers... |