Newport MKS Datasheets for Piezoelectric Actuators

Piezoelectric actuators are devices that produce a small displacement with a high force capability when voltage is applied. 
Piezoelectric Actuators: Learn more

Product Name Notes
The 8301-UHV Ultra-High Vacuum Picomotor™ Actuator offers 0.5 inch (12.7 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. It is...
The 8301-UHV-KAP Ultra-High Vacuum Picomotor™ Actuator with Kapton Wires offers 0.5 inch (12.7 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV...
The 8301-V Vacuum Compatible Picomotor™ Actuator has 0.5 inch (12.7 mm) travel, and is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use...
The 8301NF Picomotor Piezo Linear Actuator is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use it with our optomechanical translation stages or...
The 8302 Picomotor Piezo Linear Actuator is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use it with our optomechanical translation stages or...
The 8302-UHV Ultra-High Vacuum Picomotor™ Actuator offers 1.0 inch (25.4 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. It is...
The 8302-UHV-KAP Ultra-High Vacuum Picomotor™ Actuator with Kapton Wires offers 1 inch (25.4 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV...
The 8302-V Vacuum Compatible Picomotor™ Actuator has 1.0 inch (25.4 mm) travel, and is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use...
The 8303 Picomotor Piezo Linear Actuator is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use it with our optomechanical translation stages or...
The 8303-V Vacuum Compatible Picomotor™ Actuator has 2.0 inch (50.8 mm) travel, and is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use...
The 8310-V Vacuum-Compatible Closed-Loop Picomotor™ Actuator is ideal for applications where closed-loop control and absolute position calibration is required in a clean environment. Just like the Model 8310 closed-loop Picomotor...
The 8310CE Closed Loop Picomotor™ Actuator is ideal for applications where closed-loop control and absolute position calibration is required. With an integrated rotary encoder, and forward and reverse limit switches,...
The 8311 Compact Closed Loop Picomotor™ Actuator is ideal for applications where closed-loop control is required and space is limited. With an integrated rotary encoder this unique device offers the...
The 8321 Picomotor Piezo Linear Actuator is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use it with our optomechanical translation stages or...
The 8321-UHV Ultra-High Vacuum Picomotor™ Actuator offers 0.5 inch (12.7 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. It is...
The 8321-UHV-KAP Ultra-High Vacuum Picomotor™ Actuator with Kapton Wires offers 0.5 inch (12.7 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV...
The 8321-V Vacuum Compatible Picomotor™ Actuator has 0.5 inch (12.7 mm) travel, and is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use...
The 8322-V Vacuum Compatible Picomotor™ Actuator has 1.0 inch (25.4 mm) travel, and is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use...
The 8322NF Picomotor Piezo Linear Actuator is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use it with our optomechanical translation stages or...
The 8341-UHV Ultra-High Vacuum Rotating Picomotor Actuator is for those vacuum applications (10-9 Torr) requiring rotation without translation. This 0.0187 in. (4.76-mm) rotating shaft is ideal for rotating small...
The 8341-V Vacuum-Compatible Picomotor Actuator with Rotating Shaft is for those applications requiring rotation without translation. Our 0.187 in. (4.76-mm) Model 8341 is ideal for rotating small optical components or...
The 8341NF Rotating Picomotor Actuator is used for rotation without translation. 3 to 4 RPM and a standard 0.375 in (9.5 mm) shank.
The 8353 Tiny Picomotor actuator is a smaller sized version of our standard Picomotor actuators. We have improved the design so that it will meet even more of your compact-area...
The 8353-UHV is derived from our standard 8353 Tiny Picomotor and designed for use in ultrahigh vacuum applications down to base pressures of 10-9 Torr. The 8353-UHV was designed...
The 8353-V Vacuum Compatible Tiny Picomotor Actuator is designed for environments down to 10-6 Torr. It's perfect for moving small optics and stages in your vacuum chambers.
The 8354 Tiny Picomotor actuator is a smaller sized version of our standard Picomotor actuators. We have improved the design so that it will meet even more of your compact-area...