The HybrYXTM is a single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. HybrYX is well suited for semiconductor wafer inspection systems as well as being an excellent choice for use in large substrate (flat panel display and photovoltaic panel) inspection and processing tools.
| Newport MKS | |
|---|---|
| Product Category | Air Bearings |
| Product Number | HybrYX |
| Product Name | Hybrid Air Bearing Stage, Single Plane XY |
