Aerotech, Inc. Datasheets for Linear Slides and Linear Stages

Linear slides are simple linear motion devices composed of a stationary base and a moving carriage. Linear stages are slides with a drive mechanism that provide controlled, precise positioning along a linear axis.
Linear Slides and Linear Stages: Learn more

Product Name Notes
Multi-Axis Photonics Alignment System -- FiberMaxHP Design Features 2nd-generation photonics alignment platform built on high-performance ANT nanopositioners Up to 6 axes of precision motion Proven reliability for 24/7 manufacturing Noncontact, direct-drive for all axes enabling high-throughput...
Fiberoptics Aligning System -- FiberAlign 90/130 Design Features 3- to 6-axis photonics alignment Noncontact linear motor drive 2.5 nm resolution linear motion 0.027 to 0.058 arc second angular resolution Turnkey drive and control electronics Direct-drive rotary...
Fiberoptics System -- FiberAlign 130US Design Features 3-axis photonics alignment Noncontact linear motor drive 2.5 nm resolution linear motion Low C.T.E. construction Insensitive to environmental changes
Hybrid-Bearing Direct-Drive XY Linear Stage -- AHL9000 Design Features 450 mm wafer compatible Air-bearing scan axis; mechanical-bearing step axis Dual linear-motor-driven step axis Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback
Air-Bearing Direct-Drive XY Linear Stage -- ABL9000 Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw...
Air-Bearing Direct-Drive XY Linear Stage -- PlanarHD Design Features 450 mm wafer compatible Maximize throughput with 2 m/s scan velocity and 5 g acceleration Faster turnaround and minimized settling times Active yaw control Linear encoder or laser...
Air-Bearing Direct-Drive Linear Stage -- ABL8000 Design Features Active air preload on all air-bearing surfaces Travel to 1 meter Linear encoder or laser interferometer feedback High stiffness for heavy loads and excellent geometric performance Integrated XY...
PlanarHDX Two Axis, Silicon Carbide, Planar Air-Bearing Stage -- 450-450
PlanarHDX Two Axis, Silicon Carbide, Planar Air-Bearing Stage -- 600-600
PlanarHDX Two Axis, Silicon Carbide, Planar Air-Bearing Stage -- 750-750
Design Features Advanced silicon-carbide structure for high-dynamics and ultra-precise motion performance Speeds to 1.5 m/s and accelerations to 5 g Proprietary reaction-mass design enables fast turnaround and move-and-settle times Active...
Air-Bearing Gantry System -- ABG10000 Design Features Air bearings for ultra-smooth motion All axes are fully preloaded Dual linear-motor-driven lower axis Travel to 1 m x 1 m Options include Z axis, vibration isolation, machine...
Mechanical-Bearing Direct-Drive Linear Stage -- ALS130H Design Features Bidirectional repeatability to 75 nm Direct-drive linear motor for ultra-precise motion High-accuracy noncontact glass-scale linear encoder Anti-cage-creep crossed-roller bearings for smooth motion Outstanding performance in a small footprint...
Fiber Optics Subsystem -- FiberGrate 2000 Design Features Closed-loop laser interferometer or linear encoder feedback Fully preloaded air bearing Advanced PCI-bus-based or Automation 3200 software-only controller Low-noise linear amplifiers Complete noncontact design Includes granite base and...
Mechanical-Bearing Ball-Screw Linear Stage -- MPS50SL Design Features Compact 50 mm width with travel to 50 mm Precision ground ball-screw or lead-screw drive DC servo or stepper motor Crossed-roller bearings High resolution (0.1 µm), repeatability (±0.75...
Mechanical-Bearing Ball-Screw Linear Stage -- MPS75SL Design Features Compact 75 mm width with travel to 100 mm Precision ground ball-screw drive DC servo or stepper motor Anti-creep crossed-roller bearings High resolution (0.1 µm), repeatability (±0.75 µm)...
Mechanical-Bearing, Ball-Screw Stage with Linear Encoder -- MPS75SLE Design Features Compact stage with travels to 100 mm Low-thermal expansion glass-scale linear encoder Precision-ground ball-screw drive DC servo or stepper motor Anti-creep crossed-roller bearings High resolution (0.025 µm), repeatability...
Mechanical Bearing, Vertical Translation Stage MPS-SV Series -- MPS50SV-5
Mechanical Bearing, Vertical Translation Stage MPS-SV Series -- MPS75SV-5
Design Features Compact, high-performance elevation stage Precision-ground ball screw or lead screw DC or stepper motor options High-vacuum capable Precision crossed-roller bearings Multi-axis configurations available with MPS linear and rotary...
Cartesius Cartesian Robot Design Features Configurable T-style robot up to 1.5 m x 0.5 m x 0.3 m travel Velocities up to 1.4 m/s provide high throughput Integrated Cable Management System (CMS) shortens...
Air-Bearing Direct-Drive Linear Stage -- ABL1000 Design Features Designed for high-performance alignment and assembly 0.5 nm closed-loop resolution Fully preloaded air-bearing Low-noise linear amplifiers Complete noncontact design
FiberGlide 3D Fiberoptics Positioner Design Features Designed for high-performance photonics alignment and assembly Linear encoder feedback provides up to 2 nm resolution 62 picometer resolution available with the Automation 3200 Fully-preloaded air bearing Complete...
Air-Bearing Direct-Drive Linear Stage -- ABL1500 Design Features Designed for high-performance scanning and inspection 450 mm wafer compatible Active air preload on all air-bearing surfaces Linear encoder feedback provides subnanometer resolution High stiffness for heavy loads...
Air-Bearing Direct-Drive Lift Stage -- ABL1500Z Design Features Designed for high-performance scanning and inspection Active air preload on all air-bearing surfaces Linear encoder feedback provides subnanometer resolution High stiffness for heavy loads and excellent geometrical performance...
Mechanical-Bearing Direct-Drive Linear Stage -- PRO225LM Design Features Direct-drive linear motor for smooth and precise motion 450 mm wafer compatible Long-life linear motion guide bearing system Twelve models with travels from 100 mm to 1.5 m...
Mechanical-Bearing Direct-Drive Linear Stage -- PRO280LM Design Features Direct-drive linear motor for smooth and precise motion Long-life linear motion guide bearing system Eight models with travels from 300 mm to 1.5 m Side-seal design provides superior...
Mechanical-Bearing Direct-Drive Linear Stage -- ALS135 Design Features Direct-drive linear motor for ultra-precise motion High-accuracy noncontact linear encoder Outstanding performance in a small footprint
Mechanical-Bearing Direct-Drive Linear Stage -- PRO165LM Design Features Direct-drive linear motor for ultra-precise motion Long-life linear motion guide bearing system Ten models with travels from 100 mm to 1 m Low-cost, high-performance stage Fast delivery
Mechanical-Bearing Direct-Drive Linear Stage -- ALS1000 Design Features Direct-drive linear motor for ultra-precise motion Long-life linear motion guide bearing system Two-axis internal cable management system Sealed design with optional air purge Low-cost, small footprint, high-performance stage...
Fiber Positioner -- FiberCouple 130 Design Features Dual carriage on common bearing Independent or coordinated motion 2.5 nm resolution Noncontact linear motor drive Turnkey drive and control electronics Auxiliary axes available
Mechanical-Bearing Lead-Screw Z-Axis Stage -- VTS300 Design Features Extreme load carrying capability, up to 450 kg, in a compact package Small stage footprint High resolution to 0.064 µm Lead screw does not back-drive, allowing "set and...
Mechanical-Bearing Direct-Drive Linear Stage -- ALS2200 Design Features Fully enclosed design Exceptionally smooth and cog-free motion Powerful linear brushless servomotor High accuracy and up to 3 nm resolution Outstanding straightness/flatness
Air-Bearing Direct-Drive Linear Stage -- ABL2000 Design Features Fully preloaded air-bearing 450 mm wafer compatible Travel to 1.2 meter Linear encoder or laser interferometer feedback Complete noncontact design Ultra-smooth design for outstanding velocity stability
Mechanical-Bearing Direct-Drive Lift Stage -- AVL1000 Design Features High load-carrying capability High stiffness Noncontact direct-drive High accuracy Integral pneumatic counterbalance Easily configured with ARA1000 for multi-axis applications
Cartesian Gantry System -- AGS10000 Design Features High velocity to 3 m/s and high acceleration to 3 g High-power linear brushless servomotors Customizable Z and theta axes Noncontact linear encoders Optional machine base and risers...
Mechanical-Bearing Ball-Screw Lift Stage -- AVS1000 Design Features High-load lift stage with aperture Submicron closed-loop positioning Excellent pitch and yaw characteristics over full travel 5 mm or 10 mm travel; custom designs for alternate travels available...
Mechanical Bearing, Ball-Screw Stage -- ECO225SL Series Design Features High-performance in a cost-effective, economic package Rugged mechanical design Available with servomotor or stepping motor Nine models with travels from 100 mm to 800 mm Vacuum and cleanroom...
Mechanical Bearing, Ball-Screw Stage -- ECO115SL Series
Mechanical Bearing, Ball-Screw Stage -- ECO165SL Series
Design Features High-performance in a cost-effective, economic package Rugged mechanical design Available with servomotor or stepping motor Nine models with travels from 50 mm to 600 mm Vacuum and cleanroom...
Mechanical Bearing, Linear Motor Stage -- ECO165LM Series Design Features High-performance in a cost-effective, economic package Rugged mechanical design Direct-drive linear motor for precision motion Eight models with travels from 100 mm to 600 mm The ECO165LM series,...
Mechanical Bearing, Linear Motor Stage -- ECO225LM Series Design Features High-performance in a cost-effective, economic package Rugged mechanical design Direct-drive linear motor for precision motion Nine models with travels from 100 mm to 800 mm The ECO225LM series,...
Mechanical Bearing, Ball-Screw Stage -- PRO280SL and SLE
Mechanical Bearing, Ball-Screw Stage -- PRO560SL and SLE
Design Features Improved second-generation design High-performance in a cost-effective package Rugged mechanical construction Optional linear encoder 12 models with travels from 300 mm to 1000 mm Vacuum and cleanroom versions...
Mechanical Bearing, Ball-Screw Stage -- PRO115SL and SLE
Mechanical Bearing, Ball-Screw Stage -- PRO165SL and SLE
Design Features Improved second-generation design High-performance in a cost-effective package Rugged mechanical construction Optional linear encoder 18 models with travels from 50 mm to 600 mm Vacuum and cleanroom versions...
Mechanical Bearing, Ball-Screw Stage -- PRO225SL and SLE Design Features Improved second-generation design High-performance in a cost-effective package Rugged mechanical construction Optional linear encoder 20 models with travels from 100 mm to 1000 mm Vacuum and cleanroom versions...
Air-Bearing Direct-Drive Linear Stage -- ABL1500-B Design Features Integral bellows protect the drive and bearing system from contamination Designed for high-performance scanning and inspection Air-on-air preload on all air-bearing surfaces Linear encoder feedback provides nanometer-level High...
Air-Bearing Direct-Drive Linear Stage -- ABL1500WB-B Design Features Integral bellows protect the drive and bearing system from contamination Wide base for large offset loads Powerful dual linear motor drive Designed for high-performance scanning and inspection Air-on-air...
Mechanical-Bearing Direct-Drive XY Linear Stage -- ANT130-XY ULTRA Design Features Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format 2D system accuracy is 250 nm In-position stability of <1 nm High dynamic performance
Base & Plus Mechanical-Bearing Direct-Drive XY Linear Stage -- ANT130-XY Design Features Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis In-position stability...
Mechanical-Bearing Direct-Drive XY Linear Stage -- ANT95-XY ULTRA Design Features Integrated, low-profile, XY linear motor stage 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format 2D system accuracy...
Base & Plus Mechanical-Bearing Direct-Drive XY Linear Stage -- ANT95-XY Design Features Integrated, low-profile, XY linear motor stage 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format High resolution (1...
Two Axis, Mechanical Bearing, Ball-Screw Stage -- PlanarSL-100XY Design Features Integrated, low-profile, XY, ball-screw stage Long-life linear motion guide bearing system Optional low thermal expansion glass linear encoder Cost-effective, high-precision planar performance Aerotech’s PlanarSL mechanical bearing, ball-screw-driven...
PlanarDLA Open Frame, XY, Direct-Drive, Mechanical-Bearing Stage Design Features Integrated, low-profile, XY, linear-motor stage with clear aperture Excellent geometric performance (straightness to ±0.5 µm, flatness to ±1.25 µm) Optimized for high-dynamic applications Speeds to 2 m/s and...
Two Axis, Mechanical Bearing, Linear-Motor Stage -- PlanarDL Design Features Integrated, low-profile, XY, linear-motor stage Excellent geometric performance (straightness to ±0.4 µm; flatness to ±1 µm) Anti-creep, precision crossed-roller bearings Large selection – nine models in travel and...
Air-Bearing Direct-Drive Open-Frame Linear Stage -- ABL3600 Design Features Large clear aperture Full preload on all axes Dual linear-motor-driven X and Y axes Noncontact linear encoder for high accuracy
Mechanical-Bearing Ball-Screw Open-Frame Linear Stage -- ATS3600 Design Features Large, clear aperture Travel range from 100 mm x 100 mm to 400 mm x 400 mm High-performance linear motion guides 15 arc sec orthogonality Noncontact linear encoder...
Cartesian Gantry System -- AGS1000 Design Features Linear brushless servomotors for superior performance and longevity Customizable Z and theta axes for increased flexibility Optional machine base and risers Optional electroless nickel for ESD protection and...
Mechanical-Bearing Ball-Screw Linear Stage -- ATS100 Design Features Long life linear motion guide bearing system Ultra-fine resolution Integral bellows waycovers Low-profile compact design Includes brushless, slotless motor
Mechanical-Bearing Ball-Screw Linear Stage -- ATS150 Design Features Long life linear motion guide bearing system Ultra-fine resolution Integral bellows waycovers Low-profile compact design Submicron accuracy Optional high-accuracy linear encoder
Mechanical-Bearing Ball-Screw Lift Stage -- AVS/AVSI100 Design Features Long-life linear guide bearing system Submicron closed-loop positioning Low-cost, high-performance stage 6, 13 and 25 mm travel models Precision-ground ball screw Integral or removable motor
Mechanical-Bearing Ball-Screw Linear Stage -- ATS1500 Design Features Low cost; high performance Travel to 300 mm Crossed-roller bearings Three drive-screw choices and accuracy levels Low height profile Large tabletop mounting area with both metric and English...
Mechanical-Bearing Direct-Drive Lift Stage -- WaferMax Z Design Features Low profile for space-conscious applications Noncontact direct-drive High repeatability Integral pneumatic counterbalance Easily configured with WaferMax T for multi-axis applications
Linear Stage -- ATS25 Design Features Micrometer or patented* sub-micron-resolution drive 12 mm and 25 mm travel Crossed-roller bearings for superior positioning performance Low profile
Mechanical-Bearing Direct-Drive Z-Axis Stage -- ANT95-L-Z Design Features Nanometer performance in a large travel format (25 and 50 mm) High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm) In-position stability of <2 nm Anti-creep...
Mechanical-Bearing Direct-Drive Z-Axis Stage -- ANT130-L-Z Design Features Nanometer performance in a large travel format (35 and 60 mm) High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm) In-position stability of <2 nm Anti-creep...
Mechanical-Bearing Direct-Drive Lift Stage -- ANT95-3-V Design Features Nanometer performance with 3 mm vertical travel High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm) In-position stability of <1 nm Anti-creep crossed-roller bearings High dynamic...
Mechanical-Bearing Direct-Drive Lift Stage -- ANT130-V-5 Design Features Nanometer performance with 5 mm vertical travel High resolution (2 nm), repeatability (100 nm) and accuracy (200 nm) In-position stability of <2 nm Anti-creep crossed-roller bearings High dynamic...
Mechanical-Bearing Direct-Drive Linear Stage -- ANT130-L
Mechanical-Bearing Direct-Drive Linear Stage -- ANT95-L
Design Features Nanometer-level performance in a large travel format High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) In-position stability of <1 nm Anti-creep crossed-roller bearings High dynamic...
Mechanical-Bearing Direct-Drive Linear Stage -- ANT180-L Design Features Noncontact, non-cogging, frictionless direct-drive Zero backlash or hysteresis High resolution, repeatability and accuracy Anti-creep crossed-roller bearings Travel to 360 mm Integral cable management for multi-axis systems
Cartesian Gantry System -- AGS1500 Design Features Optimized design for precise contouring in a compact footprint Velocity to 3 m/s and acceleration to 5 g High power brushless linear servomotors for smooth motion Travels up...
Cartesian Gantry System -- AGS15000 Design Features Optimized design for precise contouring Velocity to 3 m/s and acceleration to 5 g High power brushless linear servomotors for smooth motion Travels up to 1.3 m X...
Mechanical-Bearing Lead-Screw Linear Stage -- ATS0300 Design Features Precision-ground, high-accuracy lead screw Ultra-fine resolution Crossed-roller bearings for high load capacity and smooth motion Includes cogless, brushless servomotor Compact profile
Mechanical-Bearing Direct-Drive Linear Stage -- ALS5000 Design Features Rugged construction Hard-coated tabletop and waycovers Fully integrated cable management system High-accuracy, noncontact linear encoder Sealed design with optional air purge
Mechanical-Bearing Ball-Screw Linear Stage -- ATS5000 Design Features Rugged construction Hard-coated tabletop and waycovers Optional high-accuracy, noncontact linear encoder Sealed design with optional air purge
Custom Linear Positioner -- PRO225LM-2000mm Design Features Shown with optional YZ, two motorized axis head and granite bridge 2 m/s, 3g max speeds with 1 kg load 100 kg load capacity Accuracy ±4 µm calibrated,...
SolarScribe Photovoltaic Panel Scribing System Design Features Split axis or gantry configurations to accommodate all PV/FPD scribing applications Choose from mechanical or air-bearing systems Direct-drive linear motor stages Travel to 2.5 m High dynamic system...
MaskAlign Photomask Aligning System Design Features Three-axis photomask alignment stage Standard interface for six or eight-inch masks Integral vacuum groove for mask retention Low profile for easy integration into optics train Direct-drive brushless servomotors...
Single-Axis Linear Piezo Nanopositioning Stages -- QNP-L Series Design Features Travel ranges from 100 µm to 600 µm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor...
Single-Axis, Z Piezo Nanopositioning Stages -- QNP-Z Series
Two-Axis, XY, Piezo Nanopositioning Stages -- QNP-XY Series
Design Features Travel ranges from 100 μm to 600 μm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor...
Air-Bearing Lift Stage -- AirLift115 Design Features Unique Z stage design incorporates fully preloaded air bearings Less than or equal to ??2 arc sec roll, pitch and yaw over full travel Submicron closed-loop positioning Travel...
Air-Bearing Direct-Drive Linear Stage -- ABL1500WB Design Features Wide base for large offset loads 450 mm wafer compatible Powerful dual linear motor drive Designed for high-performance scanning and inspection Active air preload on all air-bearing surfaces...
Mechanical-Bearing Direct-Drive Linear Stage -- PRO560LM Design Features Wider design for large, offset loads Direct-drive linear motor for smooth and precise motion Long-life linear motion guide bearing system Eight models with travels from 300 mm to...