Aerotech, Inc. Datasheets for Linear Slides and Linear Stages

Linear slides are simple linear motion devices composed of a stationary base and a moving carriage. Linear stages are slides with a drive mechanism that provide controlled, precise positioning along a linear axis.
Linear Slides and Linear Stages: Learn more

Product Name Notes
Design Features 2nd-generation photonics alignment platform built on high-performance ANT nanopositioners Up to 6 axes of precision motion Proven reliability for 24/7 manufacturing Noncontact, direct-drive for all axes enabling high-throughput...
Design Features 3- to 6-axis photonics alignment Noncontact linear motor drive 2.5 nm resolution linear motion 0.027 to 0.058 arc second angular resolution Turnkey drive and control electronics Direct-drive rotary...
Design Features 3-axis photonics alignment Noncontact linear motor drive 2.5 nm resolution linear motion Low C.T.E. construction Insensitive to environmental changes
Design Features 450 mm wafer compatible Air-bearing scan axis; mechanical-bearing step axis Dual linear-motor-driven step axis Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback
Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw...
Design Features 450 mm wafer compatible Maximize throughput with 2 m/s scan velocity and 5 g acceleration Faster turnaround and minimized settling times Active yaw control Linear encoder or laser...
Design Features Active air preload on all air-bearing surfaces Travel to 1 meter Linear encoder or laser interferometer feedback High stiffness for heavy loads and excellent geometric performance Integrated XY...
Design Features Advanced silicon-carbide structure for high-dynamics and ultra-precise motion performance Speeds to 1.5 m/s and accelerations to 5 g Proprietary reaction-mass design enables fast turnaround and move-and-settle times Active...
Design Features Air bearings for ultra-smooth motion All axes are fully preloaded Dual linear-motor-driven lower axis Travel to 1 m x 1 m Options include Z axis, vibration isolation, machine...
Design Features Bidirectional repeatability to 75 nm Direct-drive linear motor for ultra-precise motion High-accuracy noncontact glass-scale linear encoder Anti-cage-creep crossed-roller bearings for smooth motion Outstanding performance in a small footprint...
Design Features Closed-loop laser interferometer or linear encoder feedback Fully preloaded air bearing Advanced PCI-bus-based or Automation 3200 software-only controller Low-noise linear amplifiers Complete noncontact design Includes granite base and...
Design Features Compact 50 mm width with travel to 50 mm Precision ground ball-screw or lead-screw drive DC servo or stepper motor Crossed-roller bearings High resolution (0.1 µm), repeatability (±0.75...
Design Features Compact 75 mm width with travel to 100 mm Precision ground ball-screw drive DC servo or stepper motor Anti-creep crossed-roller bearings High resolution (0.1 µm), repeatability (±0.75 µm)...
Design Features Compact stage with travels to 100 mm Low-thermal expansion glass-scale linear encoder Precision-ground ball-screw drive DC servo or stepper motor Anti-creep crossed-roller bearings High resolution (0.025 µm), repeatability...
Design Features Compact, high-performance elevation stage Precision-ground ball screw or lead screw DC or stepper motor options High-vacuum capable Precision crossed-roller bearings Multi-axis configurations available with MPS linear and rotary...
Design Features Configurable T-style robot up to 1.5 m x 0.5 m x 0.3 m travel Velocities up to 1.4 m/s provide high throughput Integrated Cable Management System (CMS) shortens...
Design Features Designed for high-performance alignment and assembly 0.5 nm closed-loop resolution Fully preloaded air-bearing Low-noise linear amplifiers Complete noncontact design
Design Features Designed for high-performance photonics alignment and assembly Linear encoder feedback provides up to 2 nm resolution 62 picometer resolution available with the Automation 3200 Fully-preloaded air bearing Complete...
Design Features Designed for high-performance scanning and inspection 450 mm wafer compatible Active air preload on all air-bearing surfaces Linear encoder feedback provides subnanometer resolution High stiffness for heavy loads...
Design Features Designed for high-performance scanning and inspection Active air preload on all air-bearing surfaces Linear encoder feedback provides subnanometer resolution High stiffness for heavy loads and excellent geometrical performance...
Design Features Direct-drive linear motor for smooth and precise motion 450 mm wafer compatible Long-life linear motion guide bearing system Twelve models with travels from 100 mm to 1.5 m...
Design Features Direct-drive linear motor for smooth and precise motion Long-life linear motion guide bearing system Eight models with travels from 300 mm to 1.5 m Side-seal design provides superior...
Design Features Direct-drive linear motor for ultra-precise motion High-accuracy noncontact linear encoder Outstanding performance in a small footprint
Design Features Direct-drive linear motor for ultra-precise motion Long-life linear motion guide bearing system Ten models with travels from 100 mm to 1 m Low-cost, high-performance stage Fast delivery
Design Features Dual carriage on common bearing Independent or coordinated motion 2.5 nm resolution Noncontact linear motor drive Turnkey drive and control electronics Auxiliary axes available
Design Features Extreme load carrying capability, up to 450 kg, in a compact package Small stage footprint High resolution to 0.064 µm Lead screw does not back-drive, allowing "set and...
Design Features Fully preloaded air-bearing 450 mm wafer compatible Travel to 1.2 meter Linear encoder or laser interferometer feedback Complete noncontact design Ultra-smooth design for outstanding velocity stability
Design Features High load-carrying capability High stiffness Noncontact direct-drive High accuracy Integral pneumatic counterbalance Easily configured with ARA1000 for multi-axis applications
Design Features High velocity to 3 m/s and high acceleration to 3 g High-power linear brushless servomotors Customizable Z and theta axes Noncontact linear encoders Optional machine base and risers...
Design Features High-load lift stage with aperture Submicron closed-loop positioning Excellent pitch and yaw characteristics over full travel 5 mm or 10 mm travel; custom designs for alternate travels available...
Design Features High-performance in a cost-effective, economic package Rugged mechanical design Available with servomotor or stepping motor Nine models with travels from 100 mm to 800 mm Vacuum and cleanroom...
Design Features High-performance in a cost-effective, economic package Rugged mechanical design Available with servomotor or stepping motor Nine models with travels from 50 mm to 600 mm Vacuum and cleanroom...
Design Features High-performance in a cost-effective, economic package Rugged mechanical design Direct-drive linear motor for precision motion Eight models with travels from 100 mm to 600 mm The ECO165LM series,...
Design Features High-performance in a cost-effective, economic package Rugged mechanical design Direct-drive linear motor for precision motion Nine models with travels from 100 mm to 800 mm The ECO225LM series,...
Design Features Improved second-generation design High-performance in a cost-effective package Rugged mechanical construction Optional linear encoder 12 models with travels from 300 mm to 1000 mm Vacuum and cleanroom versions...
Design Features Improved second-generation design High-performance in a cost-effective package Rugged mechanical construction Optional linear encoder 18 models with travels from 50 mm to 600 mm Vacuum and cleanroom versions...
Design Features Improved second-generation design High-performance in a cost-effective package Rugged mechanical construction Optional linear encoder 20 models with travels from 100 mm to 1000 mm Vacuum and cleanroom versions...
Design Features Integral bellows protect the drive and bearing system from contamination Designed for high-performance scanning and inspection Air-on-air preload on all air-bearing surfaces Linear encoder feedback provides nanometer-level High...
Design Features Integral bellows protect the drive and bearing system from contamination Wide base for large offset loads Powerful dual linear motor drive Designed for high-performance scanning and inspection Air-on-air...
Design Features Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format 2D system accuracy is 250 nm In-position stability of <1 nm High dynamic performance
Design Features Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis In-position stability...
Design Features Integrated, low-profile, XY linear motor stage 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format 2D system accuracy...
Design Features Integrated, low-profile, XY linear motor stage 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format High resolution (1...
Design Features Integrated, low-profile, XY, ball-screw stage Long-life linear motion guide bearing system Optional low thermal expansion glass linear encoder Cost-effective, high-precision planar performance Aerotech’s PlanarSL mechanical bearing, ball-screw-driven...
Design Features Integrated, low-profile, XY, linear-motor stage with clear aperture Excellent geometric performance (straightness to ±0.5 µm, flatness to ±1.25 µm) Optimized for high-dynamic applications Speeds to 2 m/s and...
Design Features Integrated, low-profile, XY, linear-motor stage Excellent geometric performance (straightness to ±0.4 µm; flatness to ±1 µm) Anti-creep, precision crossed-roller bearings Large selection – nine models in travel and...
Design Features Large clear aperture Full preload on all axes Dual linear-motor-driven X and Y axes Noncontact linear encoder for high accuracy
Design Features Large, clear aperture Travel range from 100 mm x 100 mm to 400 mm x 400 mm High-performance linear motion guides 15 arc sec orthogonality Noncontact linear encoder...
Design Features Linear brushless servomotors for superior performance and longevity Customizable Z and theta axes for increased flexibility Optional machine base and risers Optional electroless nickel for ESD protection and...
Design Features Long life linear motion guide bearing system Ultra-fine resolution Integral bellows waycovers Low-profile compact design Includes brushless, slotless motor
Design Features Long life linear motion guide bearing system Ultra-fine resolution Integral bellows waycovers Low-profile compact design Submicron accuracy Optional high-accuracy linear encoder
Design Features Long-life linear guide bearing system Submicron closed-loop positioning Low-cost, high-performance stage 6, 13 and 25 mm travel models Precision-ground ball screw Integral or removable motor
Design Features Low cost; high performance Travel to 300 mm Crossed-roller bearings Three drive-screw choices and accuracy levels Low height profile Large tabletop mounting area with both metric and English...
Design Features Low profile for space-conscious applications Noncontact direct-drive High repeatability Integral pneumatic counterbalance Easily configured with WaferMax T for multi-axis applications
Design Features Nanometer performance in a large travel format (25 and 50 mm) High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm) In-position stability of <2 nm Anti-creep...
Design Features Nanometer performance in a large travel format (35 and 60 mm) High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm) In-position stability of <2 nm Anti-creep...
Design Features Nanometer performance with 3 mm vertical travel High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm) In-position stability of <1 nm Anti-creep crossed-roller bearings High dynamic...
Design Features Nanometer performance with 5 mm vertical travel High resolution (2 nm), repeatability (100 nm) and accuracy (200 nm) In-position stability of <2 nm Anti-creep crossed-roller bearings High dynamic...
Design Features Nanometer-level performance in a large travel format High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) In-position stability of <1 nm Anti-creep crossed-roller bearings High dynamic...
Design Features Noncontact, non-cogging, frictionless direct-drive Zero backlash or hysteresis High resolution, repeatability and accuracy Anti-creep crossed-roller bearings Travel to 360 mm Integral cable management for multi-axis systems
Design Features Optimized design for precise contouring in a compact footprint Velocity to 3 m/s and acceleration to 5 g High power brushless linear servomotors for smooth motion Travels up...
Design Features Optimized design for precise contouring Velocity to 3 m/s and acceleration to 5 g High power brushless linear servomotors for smooth motion Travels up to 1.3 m X...
Design Features Precision-ground, high-accuracy lead screw Ultra-fine resolution Crossed-roller bearings for high load capacity and smooth motion Includes cogless, brushless servomotor Compact profile
Design Features Rugged construction Hard-coated tabletop and waycovers Fully integrated cable management system High-accuracy, noncontact linear encoder Sealed design with optional air purge
Design Features Rugged construction Hard-coated tabletop and waycovers Optional high-accuracy, noncontact linear encoder Sealed design with optional air purge
Design Features Shown with optional YZ, two motorized axis head and granite bridge 2 m/s, 3g max speeds with 1 kg load 100 kg load capacity Accuracy ±4 µm calibrated,...
Design Features Split axis or gantry configurations to accommodate all PV/FPD scribing applications Choose from mechanical or air-bearing systems Direct-drive linear motor stages Travel to 2.5 m High dynamic system...
Design Features Three-axis photomask alignment stage Standard interface for six or eight-inch masks Integral vacuum groove for mask retention Low profile for easy integration into optics train Direct-drive brushless servomotors...
Design Features Travel ranges from 100 µm to 600 µm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor...
Design Features Travel ranges from 100 μm to 600 μm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor...
Design Features Unique Z stage design incorporates fully preloaded air bearings Less than or equal to ??2 arc sec roll, pitch and yaw over full travel Submicron closed-loop positioning Travel...
Design Features Wide base for large offset loads 450 mm wafer compatible Powerful dual linear motor drive Designed for high-performance scanning and inspection Active air preload on all air-bearing surfaces...
Design Features Wider design for large, offset loads Direct-drive linear motor for smooth and precise motion Long-life linear motion guide bearing system Eight models with travels from 300 mm to...