ANT95-XY ULTRA -- MECHANICAL-BEARING DIRECT-DRIVE XY LINEAR STAGE
Aerotech, Inc.Mechanical-Bearing Direct-Drive XY Linear StageANT95-XY ULTRA
Description
Design Features
Integrated, low-profile, XY linear motor stage
25 mm x 25 mm or 50 mm x 50 mm travel
Nanometer-level performance in a large travel format
2D system accuracy is 250 nm
In-position stability is <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Aerotech, Inc.
Done
Datasheet
Description
Design Features
Integrated, low-profile, XY linear motor stage
25 mm x 25 mm or 50 mm x 50 mm travel
Nanometer-level performance in a large travel format
2D system accuracy is 250 nm
In-position stability is <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Design Features
Integrated, low-profile, XY linear motor stage
25 mm x 25 mm or 50 mm x 50 mm travel
Nanometer-level performance in a large travel format
2D system accuracy is 250 nm
In-position stability is <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Design Features
Integrated, low-profile, XY linear motor stage
25 mm x 25 mm or 50 mm x 50 mm travel
Nanometer-level performance in a large travel format
