Design Features
Nanometer performance with 3 mm vertical travel
High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Aerotech, Inc.
Done
Datasheet
Description
Design Features
Nanometer performance with 3 mm vertical travel
High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Design Features
Nanometer performance with 3 mm vertical travel
High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Design Features
Nanometer performance with 3 mm vertical travel
High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Supplier's Site
Datasheet
Technical Specifications
Aerotech, Inc.
Product Category
Linear Slides and Linear Stages
Product Number
ANT95-3-V
Product Name
Mechanical-Bearing Direct-Drive Lift Stage
Axis Configuration
Z Axis Only
Z-Axis Travel
0.1181 inch (3 mm)
Rated Speed
2.95 to 5.91 in/sec (4.5 to 9 m/min)
Carriage Load
3.31 lbs (1.5 kg)
Positioning Accuracy
2.00E-4 to 0.0020 inch/inch (2.00E-4 to 0.0020 mm/mm)
