Design Features
3-axis photonics alignment
Noncontact linear motor drive
2.5 nm resolution linear motion
Low C.T.E. construction
Insensitive to environmental changes
Aerotech, Inc.
Done
Datasheet
Description
Design Features
3-axis photonics alignment
Noncontact linear motor drive
2.5 nm resolution linear motion
Low C.T.E. construction
Insensitive to environmental changes
Design Features
3-axis photonics alignment
Noncontact linear motor drive
2.5 nm resolution linear motion
Low C.T.E. construction
Insensitive to environmental changes