PLANARHD -- AIR-BEARING DIRECT-DRIVE XY LINEAR STAGE
Aerotech, Inc.Air-Bearing Direct-Drive XY Linear StagePlanarHD
Description
Design Features
450 mm wafer compatible
Maximize throughput with 2 m/s scan velocity and 5 g acceleration
Faster turnaround and minimized settling times
Active yaw control
Linear encoder or laser interferometer feedback
Travel to 1.2 m by 1.2 m
Aerotech, Inc.
Done
Datasheet
Description
Design Features
450 mm wafer compatible
Maximize throughput with 2 m/s scan velocity and 5 g acceleration
Faster turnaround and minimized settling times
Active yaw control
Linear encoder or laser interferometer feedback
Travel to 1.2 m by 1.2 m
Design Features
450 mm wafer compatible
Maximize throughput with 2 m/s scan velocity and 5 g acceleration
Faster turnaround and minimized settling times
Active yaw control
Linear encoder or laser interferometer feedback
Travel to 1.2 m by 1.2 m
Design Features
450 mm wafer compatible
Maximize throughput with 2 m/s scan velocity and 5 g acceleration
