Aerotech, Inc.Air-Bearing Direct-Drive Linear StageABL1500
Description
Design Features
Designed for high-performance scanning and inspection
450 mm wafer compatible
Active air preload on all air-bearing surfaces
Linear encoder feedback provides subnanometer resolution
High stiffness for heavy loads and excellent geometric performance
Travel up to 500 mm
Aerotech, Inc.
Done
Datasheet
Description
Design Features
Designed for high-performance scanning and inspection
450 mm wafer compatible
Active air preload on all air-bearing surfaces
Linear encoder feedback provides subnanometer resolution
High stiffness for heavy loads and excellent geometric performance
Travel up to 500 mm
Design Features
Designed for high-performance scanning and inspection
450 mm wafer compatible
Active air preload on all air-bearing surfaces
Linear encoder feedback provides subnanometer resolution
High stiffness for heavy loads and excellent geometric performance
Travel up to 500 mm
Design Features
Designed for high-performance scanning and inspection
450 mm wafer compatible
Active air preload on all air-bearing surfaces
Linear encoder feedback provides subnanometer resolution
High stiffness for heavy loads and excellent geometric performance
