Aerotech, Inc. Air-Bearing Direct-Drive XY Linear Stage ABL9000

Description
Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw control
  • Air-Bearing Direct-Drive XY Linear Stage - ABL9000 - Aerotech, Inc.
    Aerotech, Inc.
Datasheet
Description
Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw control
Datasheet

Suppliers

Company
Product
Description
Supplier Links
Air-Bearing Direct-Drive XY Linear Stage - ABL9000 - Aerotech, Inc.
Aerotech, Inc.
Pittsburgh, PA, USA
Air-Bearing Direct-Drive XY Linear Stage
ABL9000
Air-Bearing Direct-Drive XY Linear Stage ABL9000
Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw control

Design Features

  • 450 mm wafer compatible
  • Full preload on all axes
  • Dual linear-motor-driven Y axes
  • Travel to 1.2 meter by 1.2 meter
  • Linear encoder or laser interferometer feedback
  • Active yaw control
Supplier's Site Datasheet

Technical Specifications

  Aerotech, Inc.
Product Category Linear Slides and Linear Stages
Product Number ABL9000
Product Name Air-Bearing Direct-Drive XY Linear Stage
Axis Configuration X-Y Open Frame
Stroke or X-Axis Travel 11.81 to 47.24 inch (300 to 1200 mm)
Y-Axis Travel 11.81 to 47.24 inch (300 to 1200 mm)
Rated Speed 19.69 in/sec (30 m/min)
Carriage Load 66.15 lbs (30 kg)
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