Aerotech, Inc. Air-Bearing Direct-Drive XY Linear Stage ABL9000

Description

Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw control

Aerotech, Inc.

Datasheet

Description

Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw control

Datasheet

Suppliers

Company

Product

Description

Supplier Links

Aerotech, Inc.

Pittsburgh, PA, USA

Air-Bearing Direct-Drive XY Linear Stage
ABL9000

Air-Bearing Direct-Drive XY Linear Stage ABL9000

Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw control

Supplier's Site

Datasheet

Technical Specifications

	Aerotech, Inc.
Product Category	Linear Slides and Linear Stages
Product Number	ABL9000
Product Name	Air-Bearing Direct-Drive XY Linear Stage
Axis Configuration	X-Y Open Frame
Stroke or X-Axis Travel	11.81 to 47.24 inch (300 to 1200 mm)
Y-Axis Travel	11.81 to 47.24 inch (300 to 1200 mm)
Rated Speed	19.69 in/sec (30 m/min)
Carriage Load	66.15 lbs (30 kg)