ABL9000 -- AIR-BEARING DIRECT-DRIVE XY LINEAR STAGE
Aerotech, Inc.Air-Bearing Direct-Drive XY Linear StageABL9000
Description
Design Features
450 mm wafer compatible
Full preload on all axes
Dual linear-motor-driven Y axes
Travel to 1.2 meter by 1.2 meter
Linear encoder or laser interferometer feedback
Active yaw control
Aerotech, Inc.
Done
Datasheet
Description
Design Features
450 mm wafer compatible
Full preload on all axes
Dual linear-motor-driven Y axes
Travel to 1.2 meter by 1.2 meter
Linear encoder or laser interferometer feedback
Active yaw control
Design Features
450 mm wafer compatible
Full preload on all axes
Dual linear-motor-driven Y axes
Travel to 1.2 meter by 1.2 meter
Linear encoder or laser interferometer feedback
Active yaw control