Design Features
Nanometer performance in a large travel format (35 and 60 mm)
High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance
Aerotech, Inc.
Done
Datasheet
Description
Design Features
Nanometer performance in a large travel format (35 and 60 mm)
High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance
Design Features
Nanometer performance in a large travel format (35 and 60 mm)
High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance
Design Features
Nanometer performance in a large travel format (35 and 60 mm)
High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance
Supplier's Site
Datasheet
Technical Specifications
Aerotech, Inc.
Product Category
Linear Slides and Linear Stages
Product Number
ANT130-L-Z
Product Name
Mechanical-Bearing Direct-Drive Z-Axis Stage
Axis Configuration
Z Axis Only
Z-Axis Travel
1.38 to 2.36 inch (35 to 60 mm)
Rated Speed
7.87 in/sec (12 m/min)
Carriage Load
22.05 lbs (10 kg)
Positioning Accuracy
3.00E-4 to 0.0030 inch/inch (3.00E-4 to 0.0030 mm/mm)