Design Features
3- to 6-axis photonics alignment
Noncontact linear motor drive
2.5 nm resolution linear motion
0.027 to 0.058 arc second angular resolution
Turnkey drive and control electronics
Direct-drive rotary axes
Raster, spiral, or power peaking algorithms
Interface to industry-standard power meters
Integrated vision systems options
Aerotech, Inc.
Done
Datasheet
Description
Design Features
3- to 6-axis photonics alignment
Noncontact linear motor drive
2.5 nm resolution linear motion
0.027 to 0.058 arc second angular resolution
Turnkey drive and control electronics
Direct-drive rotary axes
Raster, spiral, or power peaking algorithms
Interface to industry-standard power meters
Integrated vision systems options
Design Features
3- to 6-axis photonics alignment
Noncontact linear motor drive
2.5 nm resolution linear motion
0.027 to 0.058 arc second angular resolution
Turnkey drive and control electronics
Direct-drive rotary axes
Raster, spiral, or power peaking algorithms
Interface to industry-standard power meters
Integrated vision systems options