Design Features
Three-axis photomask alignment stage
Standard interface for six or eight-inch masks
Integral vacuum groove for mask retention
Low profile for easy integration into optics train
Direct-drive brushless servomotors
Aerotech, Inc.
Done
Datasheet
Description
Design Features
Three-axis photomask alignment stage
Standard interface for six or eight-inch masks
Integral vacuum groove for mask retention
Low profile for easy integration into optics train
Direct-drive brushless servomotors
Design Features
Three-axis photomask alignment stage
Standard interface for six or eight-inch masks
Integral vacuum groove for mask retention
Low profile for easy integration into optics train
Direct-drive brushless servomotors
Design Features
Three-axis photomask alignment stage
Standard interface for six or eight-inch masks
Integral vacuum groove for mask retention
Low profile for easy integration into optics train
