Aerotech, Inc. Datasheets for Z-Axis Stages

Z-axis stages are lift stages that move up and down on the vertical axis with a high degree of resolution. They are used in all kinds of applications where high-accuracy vertical positioning is required.
Z-Axis Stages: Learn more

Product Name Notes
Design Features Compact, high-performance elevation stage Precision-ground ball screw or lead screw DC or stepper motor options High-vacuum capable Precision crossed-roller bearings Multi-axis configurations available with MPS linear and rotary...
Design Features Designed for high-performance scanning and inspection Active air preload on all air-bearing surfaces Linear encoder feedback provides subnanometer resolution High stiffness for heavy loads and excellent geometrical performance...
Design Features Extreme load carrying capability, up to 450 kg, in a compact package Small stage footprint High resolution to 0.064 µm Lead screw does not back-drive, allowing "set and...
Design Features High load-carrying capability High stiffness Noncontact direct-drive High accuracy Integral pneumatic counterbalance Easily configured with ARA1000 for multi-axis applications
Design Features High-load lift stage with aperture Submicron closed-loop positioning Excellent pitch and yaw characteristics over full travel 5 mm or 10 mm travel; custom designs for alternate travels available...
Design Features Long-life linear guide bearing system Submicron closed-loop positioning Low-cost, high-performance stage 6, 13 and 25 mm travel models Precision-ground ball screw Integral or removable motor
Design Features Low profile for space-conscious applications Noncontact direct-drive High repeatability Integral pneumatic counterbalance Easily configured with WaferMax T for multi-axis applications
Design Features Nanometer performance in a large travel format (25 and 50 mm) High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm) In-position stability of <2 nm Anti-creep...
Design Features Nanometer performance in a large travel format (35 and 60 mm) High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm) In-position stability of <2 nm Anti-creep...
Design Features Nanometer performance with 3 mm vertical travel High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm) In-position stability of <1 nm Anti-creep crossed-roller bearings High dynamic...
Design Features Nanometer performance with 5 mm vertical travel High resolution (2 nm), repeatability (100 nm) and accuracy (200 nm) In-position stability of <2 nm Anti-creep crossed-roller bearings High dynamic...
Design Features Travel ranges from 100 μm to 600 μm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor...
Design Features Unique Z stage design incorporates fully preloaded air bearings Less than or equal to ??2 arc sec roll, pitch and yaw over full travel Submicron closed-loop positioning Travel...