Aerotech, Inc. Datasheets for Multi-axis Positioning Systems

Multi-axis positioning systems make use of linear, rotary and goniometric stages, slides and drives in various combinations to create standard and custom positioning systems.


Multi-axis Positioning Systems: Learn more

Product Name Notes
Multi-Axis Photonics Alignment System -- FiberMaxHP Design Features 2nd-generation photonics alignment platform built on high-performance ANT nanopositioners Up to 6 axes of precision motion Proven reliability for 24/7 manufacturing Noncontact, direct-drive for all axes enabling high-throughput...
Fiberoptics Aligning System -- FiberAlign 90/130 Design Features 3- to 6-axis photonics alignment Noncontact linear motor drive 2.5 nm resolution linear motion 0.027 to 0.058 arc second angular resolution Turnkey drive and control electronics Direct-drive rotary...
Fiberoptics System -- FiberAlign 130US Design Features 3-axis photonics alignment Noncontact linear motor drive 2.5 nm resolution linear motion Low C.T.E. construction Insensitive to environmental changes
Hybrid-Bearing Direct-Drive XY Linear Stage -- AHL9000 Design Features 450 mm wafer compatible Air-bearing scan axis; mechanical-bearing step axis Dual linear-motor-driven step axis Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback
Air-Bearing Direct-Drive XY Linear Stage -- ABL9000 Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw...
Air-Bearing Direct-Drive XY Linear Stage -- PlanarHD Design Features 450 mm wafer compatible Maximize throughput with 2 m/s scan velocity and 5 g acceleration Faster turnaround and minimized settling times Active yaw control Linear encoder or laser...
PlanarHDX Two Axis, Silicon Carbide, Planar Air-Bearing Stage -- 450-450
PlanarHDX Two Axis, Silicon Carbide, Planar Air-Bearing Stage -- 600-600
PlanarHDX Two Axis, Silicon Carbide, Planar Air-Bearing Stage -- 750-750
Design Features Advanced silicon-carbide structure for high-dynamics and ultra-precise motion performance Speeds to 1.5 m/s and accelerations to 5 g Proprietary reaction-mass design enables fast turnaround and move-and-settle times Active...
Air-Bearing Gantry System -- ABG10000 Design Features Air bearings for ultra-smooth motion All axes are fully preloaded Dual linear-motor-driven lower axis Travel to 1 m x 1 m Options include Z axis, vibration isolation, machine...
Cartesius Cartesian Robot Design Features Configurable T-style robot up to 1.5 m x 0.5 m x 0.3 m travel Velocities up to 1.4 m/s provide high throughput Integrated Cable Management System (CMS) shortens...
FiberGlide 3D Fiberoptics Positioner Design Features Designed for high-performance photonics alignment and assembly Linear encoder feedback provides up to 2 nm resolution 62 picometer resolution available with the Automation 3200 Fully-preloaded air bearing Complete...
Cartesian Gantry System -- AGS10000 Design Features High velocity to 3 m/s and high acceleration to 3 g High-power linear brushless servomotors Customizable Z and theta axes Noncontact linear encoders Optional machine base and risers...
Mechanical-Bearing Direct-Drive XY Linear Stage -- ANT130-XY ULTRA Design Features Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format 2D system accuracy is 250 nm In-position stability of <1 nm High dynamic performance
Base & Plus Mechanical-Bearing Direct-Drive XY Linear Stage -- ANT130-XY Design Features Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis In-position stability...
Mechanical-Bearing Direct-Drive XY Linear Stage -- ANT95-XY ULTRA Design Features Integrated, low-profile, XY linear motor stage 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format 2D system accuracy...
Base & Plus Mechanical-Bearing Direct-Drive XY Linear Stage -- ANT95-XY Design Features Integrated, low-profile, XY linear motor stage 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format High resolution (1...
Two Axis, Mechanical Bearing, Ball-Screw Stage -- PlanarSL-100XY Design Features Integrated, low-profile, XY, ball-screw stage Long-life linear motion guide bearing system Optional low thermal expansion glass linear encoder Cost-effective, high-precision planar performance Aerotech’s PlanarSL mechanical bearing, ball-screw-driven...
PlanarDLA Open Frame, XY, Direct-Drive, Mechanical-Bearing Stage Design Features Integrated, low-profile, XY, linear-motor stage with clear aperture Excellent geometric performance (straightness to ±0.5 µm, flatness to ±1.25 µm) Optimized for high-dynamic applications Speeds to 2 m/s and...
Air-Bearing Direct-Drive Open-Frame Linear Stage -- ABL3600 Design Features Large clear aperture Full preload on all axes Dual linear-motor-driven X and Y axes Noncontact linear encoder for high accuracy
Mechanical-Bearing Ball-Screw Open-Frame Linear Stage -- ATS3600 Design Features Large, clear aperture Travel range from 100 mm x 100 mm to 400 mm x 400 mm High-performance linear motion guides 15 arc sec orthogonality Noncontact linear encoder...
Cartesian Gantry System -- AGS1000 Design Features Linear brushless servomotors for superior performance and longevity Customizable Z and theta axes for increased flexibility Optional machine base and risers Optional electroless nickel for ESD protection and...
Cartesian Gantry System -- AGS1500 Design Features Optimized design for precise contouring in a compact footprint Velocity to 3 m/s and acceleration to 5 g High power brushless linear servomotors for smooth motion Travels up...
Cartesian Gantry System -- AGS15000 Design Features Optimized design for precise contouring Velocity to 3 m/s and acceleration to 5 g High power brushless linear servomotors for smooth motion Travels up to 1.3 m X...
Mechanical-Bearing Lead-Screw Linear Stage -- ATS0300 Design Features Precision-ground, high-accuracy lead screw Ultra-fine resolution Crossed-roller bearings for high load capacity and smooth motion Includes cogless, brushless servomotor Compact profile
SolarScribe Photovoltaic Panel Scribing System Design Features Split axis or gantry configurations to accommodate all PV/FPD scribing applications Choose from mechanical or air-bearing systems Direct-drive linear motor stages Travel to 2.5 m High dynamic system...
MaskAlign Photomask Aligning System Design Features Three-axis photomask alignment stage Standard interface for six or eight-inch masks Integral vacuum groove for mask retention Low profile for easy integration into optics train Direct-drive brushless servomotors...
Two-Axis, XY, Piezo Nanopositioning Stages -- QNP-XY Series Design Features Travel ranges from 100 μm to 600 μm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor...