Aerotech, Inc. Datasheets for Multi-axis Positioning Systems

Multi-axis positioning systems make use of linear, rotary and goniometric stages, slides and drives in various combinations to create standard and custom positioning systems.


Multi-axis Positioning Systems: Learn more

Product Name Notes
Design Features 2nd-generation photonics alignment platform built on high-performance ANT nanopositioners Up to 6 axes of precision motion Proven reliability for 24/7 manufacturing Noncontact, direct-drive for all axes enabling high-throughput...
Design Features 3- to 6-axis photonics alignment Noncontact linear motor drive 2.5 nm resolution linear motion 0.027 to 0.058 arc second angular resolution Turnkey drive and control electronics Direct-drive rotary...
Design Features 3-axis photonics alignment Noncontact linear motor drive 2.5 nm resolution linear motion Low C.T.E. construction Insensitive to environmental changes
Design Features 450 mm wafer compatible Air-bearing scan axis; mechanical-bearing step axis Dual linear-motor-driven step axis Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback
Design Features 450 mm wafer compatible Full preload on all axes Dual linear-motor-driven Y axes Travel to 1.2 meter by 1.2 meter Linear encoder or laser interferometer feedback Active yaw...
Design Features 450 mm wafer compatible Maximize throughput with 2 m/s scan velocity and 5 g acceleration Faster turnaround and minimized settling times Active yaw control Linear encoder or laser...
Design Features Advanced silicon-carbide structure for high-dynamics and ultra-precise motion performance Speeds to 1.5 m/s and accelerations to 5 g Proprietary reaction-mass design enables fast turnaround and move-and-settle times Active...
Design Features Air bearings for ultra-smooth motion All axes are fully preloaded Dual linear-motor-driven lower axis Travel to 1 m x 1 m Options include Z axis, vibration isolation, machine...
Design Features Configurable T-style robot up to 1.5 m x 0.5 m x 0.3 m travel Velocities up to 1.4 m/s provide high throughput Integrated Cable Management System (CMS) shortens...
Design Features Designed for high-performance photonics alignment and assembly Linear encoder feedback provides up to 2 nm resolution 62 picometer resolution available with the Automation 3200 Fully-preloaded air bearing Complete...
Design Features High velocity to 3 m/s and high acceleration to 3 g High-power linear brushless servomotors Customizable Z and theta axes Noncontact linear encoders Optional machine base and risers...
Design Features Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format 2D system accuracy is 250 nm In-position stability of <1 nm High dynamic performance
Design Features Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis In-position stability...
Design Features Integrated, low-profile, XY linear motor stage 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format 2D system accuracy...
Design Features Integrated, low-profile, XY linear motor stage 25 mm x 25 mm or 50 mm x 50 mm travel Nanometer-level performance in a large travel format High resolution (1...
Design Features Integrated, low-profile, XY, ball-screw stage Long-life linear motion guide bearing system Optional low thermal expansion glass linear encoder Cost-effective, high-precision planar performance Aerotech’s PlanarSL mechanical bearing, ball-screw-driven...
Design Features Integrated, low-profile, XY, linear-motor stage with clear aperture Excellent geometric performance (straightness to ±0.5 µm, flatness to ±1.25 µm) Optimized for high-dynamic applications Speeds to 2 m/s and...
Design Features Large clear aperture Full preload on all axes Dual linear-motor-driven X and Y axes Noncontact linear encoder for high accuracy
Design Features Large, clear aperture Travel range from 100 mm x 100 mm to 400 mm x 400 mm High-performance linear motion guides 15 arc sec orthogonality Noncontact linear encoder...
Design Features Linear brushless servomotors for superior performance and longevity Customizable Z and theta axes for increased flexibility Optional machine base and risers Optional electroless nickel for ESD protection and...
Design Features Optimized design for precise contouring in a compact footprint Velocity to 3 m/s and acceleration to 5 g High power brushless linear servomotors for smooth motion Travels up...
Design Features Optimized design for precise contouring Velocity to 3 m/s and acceleration to 5 g High power brushless linear servomotors for smooth motion Travels up to 1.3 m X...
Design Features Precision-ground, high-accuracy lead screw Ultra-fine resolution Crossed-roller bearings for high load capacity and smooth motion Includes cogless, brushless servomotor Compact profile
Design Features Split axis or gantry configurations to accommodate all PV/FPD scribing applications Choose from mechanical or air-bearing systems Direct-drive linear motor stages Travel to 2.5 m High dynamic system...
Design Features Three-axis photomask alignment stage Standard interface for six or eight-inch masks Integral vacuum groove for mask retention Low profile for easy integration into optics train Direct-drive brushless servomotors...
Design Features Travel ranges from 100 μm to 600 μm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor...