Aerotech, Inc.Air-Bearing Direct-Drive Linear StageABL2000
Description
Design Features
Fully preloaded air-bearing
450 mm wafer compatible
Travel to 1.2 meter
Linear encoder or laser interferometer feedback
Complete noncontact design
Ultra-smooth design for outstanding velocity stability
Aerotech, Inc.
Done
Datasheet
Description
Design Features
Fully preloaded air-bearing
450 mm wafer compatible
Travel to 1.2 meter
Linear encoder or laser interferometer feedback
Complete noncontact design
Ultra-smooth design for outstanding velocity stability
Design Features
Fully preloaded air-bearing
450 mm wafer compatible
Travel to 1.2 meter
Linear encoder or laser interferometer feedback
Complete noncontact design
Ultra-smooth design for outstanding velocity stability
Design Features
Fully preloaded air-bearing
450 mm wafer compatible
Travel to 1.2 meter
Linear encoder or laser interferometer feedback
Complete noncontact design
Ultra-smooth design for outstanding velocity stability
