WAFERMAX Z -- MECHANICAL-BEARING DIRECT-DRIVE LIFT STAGE
Aerotech, Inc.Mechanical-Bearing Direct-Drive Lift StageWaferMax Z
Description
Design Features
Low profile for space-conscious applications
Noncontact direct-drive
High repeatability
Integral pneumatic counterbalance
Easily configured with WaferMax T for multi-axis applications
Aerotech, Inc.
Done
Datasheet
Description
Design Features
Low profile for space-conscious applications
Noncontact direct-drive
High repeatability
Integral pneumatic counterbalance
Easily configured with WaferMax T for multi-axis applications
Mechanical-Bearing Direct-Drive Lift Stage
WaferMax Z
Mechanical-Bearing Direct-Drive Lift Stage
WaferMax Z
Design Features
Low profile for space-conscious applications
Noncontact direct-drive
High repeatability
Integral pneumatic counterbalance
Easily configured with WaferMax T for multi-axis applications
Design Features
Low profile for space-conscious applications
Noncontact direct-drive
High repeatability
Integral pneumatic counterbalance
Easily configured with WaferMax T for multi-axis applications