ABL1500WB -- AIR-BEARING DIRECT-DRIVE LINEAR STAGE
Aerotech, Inc.Air-Bearing Direct-Drive Linear StageABL1500WB
Description
Design Features
Wide base for large offset loads
450 mm wafer compatible
Powerful dual linear motor drive
Designed for high-performance scanning and inspection
Active air preload on all air-bearing surfaces
Linear encoder feedback provides sub-nanometer resolution
High stiffness for heavy loads and excellent geometric performance
Four models with travels from 200 mm to 500 mm
Aerotech, Inc.
Done
Datasheet
Description
Design Features
Wide base for large offset loads
450 mm wafer compatible
Powerful dual linear motor drive
Designed for high-performance scanning and inspection
Active air preload on all air-bearing surfaces
Linear encoder feedback provides sub-nanometer resolution
High stiffness for heavy loads and excellent geometric performance
Four models with travels from 200 mm to 500 mm
Design Features
Wide base for large offset loads
450 mm wafer compatible
Powerful dual linear motor drive
Designed for high-performance scanning and inspection
Active air preload on all air-bearing surfaces
Linear encoder feedback provides sub-nanometer resolution
High stiffness for heavy loads and excellent geometric performance
Four models with travels from 200 mm to 500 mm
Design Features
Wide base for large offset loads
450 mm wafer compatible
Powerful dual linear motor drive
Designed for high-performance scanning and inspection
Active air preload on all air-bearing surfaces
Linear encoder feedback provides sub-nanometer resolution
High stiffness for heavy loads and excellent geometric performance
