AHL9000 -- HYBRID-BEARING DIRECT-DRIVE XY LINEAR STAGE
Aerotech, Inc.Hybrid-Bearing Direct-Drive XY Linear StageAHL9000
Description
Design Features
450 mm wafer compatible
Air-bearing scan axis; mechanical-bearing step axis
Dual linear-motor-driven step axis
Travel to 1.2 meter by 1.2 meter
Linear encoder or laser interferometer feedback
Aerotech, Inc.
Done
Datasheet
Description
Design Features
450 mm wafer compatible
Air-bearing scan axis; mechanical-bearing step axis
Dual linear-motor-driven step axis
Travel to 1.2 meter by 1.2 meter
Linear encoder or laser interferometer feedback
Hybrid-Bearing Direct-Drive XY Linear Stage
AHL9000
Hybrid-Bearing Direct-Drive XY Linear Stage
AHL9000
Design Features
450 mm wafer compatible
Air-bearing scan axis; mechanical-bearing step axis
Dual linear-motor-driven step axis
Travel to 1.2 meter by 1.2 meter
Linear encoder or laser interferometer feedback
