The 8321-UHV Ultra-High Vacuum Picomotor™ Actuator offers 0.5 inch (12.7 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. It is ideal for beam-steering and scientific vacuum motion-control applications. This actuator offers the same better than 30-nm resolution with minimal backlash along with excellent long-term stability and high stiffness, including the ability to maintain their set positions even in the power-off state. And, with tested lifetimes of over 15,000 cycles over a 2-mm round-trip travel, you can integrate them into your system with confidence. 12 x 0.5 mm threads are used for mounting.
| Newport MKS | |
|---|---|
| Product Category | Piezoelectric Actuators |
| Product Number | 8321-UHV |
| Product Name | Picomotor Actuator, Ultra-High Vacuum, 0.5 in., 12 x 0.5 mm Thread |
| Blocked Force | 22 N (79.13 oz) |