The 8321-UHV picomotor actuator is a vacuum-compatible motion device for beam-steering and scientific applications in ultra-high vacuum environments, offering 12.7 mm travel and an M12x0.5 thread for mounting. It achieves minimum incremental motion below 30 nm, provides a maximum axial holding force of 90 N, and maintains position without power. The actuator is compatible with ultra-high vacuum pressures up to 10⁻⁹ hPa and uses Teflon wires. It operates at frequencies below 2000 Hz, with a rated life exceeding 10⁹ steps and a maximum speed greater than 1.46 mm/min. Operating temperature ranges from +10°C to +40°C, with storage from -5°C to 40°C at less than 40% relative humidity. The device features flying leads inside the chamber and a supplied 2.1 m RJ22 cable outside the chamber. Dimensions include a length of 44.5 mm for the Teflon wires and a body diameter of 16.0 mm.
The 8321-UHV Ultra-High Vacuum Picomotor™ Actuator offers 0.5 inch (12.7 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. It is ideal for beam-steering and scientific vacuum motion-control applications. This actuator offers the same better than 30-nm resolution with minimal backlash along with excellent long-term stability and high stiffness, including the ability to maintain their set positions even in the power-off state. And, with tested lifetimes of over 15,000 cycles over a 2-mm round-trip travel, you can integrate them into your system with confidence. 12 x 0.5 mm threads are used for mounting.
| Newport MKS | |
|---|---|
| Product Category | Piezoelectric Actuators |
| Product Number | 8321-UHV |
| Product Name | Picomotor Actuator, Ultra-High Vacuum, 0.5 in., 12 x 0.5 mm Thread |
| Blocked Force | 22 N (79.13 oz) |
