PI (Physik Instrumente) L.P. Datasheets for Linear Slides and Linear Stages

Linear slides are simple linear motion devices composed of a stationary base and a moving carriage. Linear stages are slides with a drive mechanism that provide controlled, precise positioning along a linear axis.
Linear Slides and Linear Stages: Learn more

Product Name Notes
Compact Linear Stage -- L-408 Crossed roller guide With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer...
XY Positioning Stage -- U-723
XY Positioning Stage -- U-751
Precision-class XY stage PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy...
Compact Linear Stage -- L-505 Product overview Compact linear stage with low-backlash leadscrew and ball guides. Directly mountable XY combination. Integrated reference point and limit switches: Hall effect. The linear stage is available in two...
XY Positioning Stage -- U-780 Reference-class microscope XY stage System with controller and joystick. Large clear aperture 160 mm × 110 mm. Suitable for the following inverted microscopes: Nikon Eclipse Ti-E/Ti-U/Ti-S Olympus IX2 Leica DMI...
Linear Stage, Vacuum -- LS-270 KEY FEATURES Travel r ange up to 1016 mm (40") Uni-directional repeatability do wn to 0.05 μm Maximum speed 150 mm/sec Load capacity up to 150 kg Integr ated inductiv...
PIMag® High-Load Linear Stage -- V-417 A new linear stage family with linear motors expands PI's product portfolio for industrial solutions. High-performance ironless linear motors, heavy-duty recirculating ball bearings, and precision linear encoders are used. The...
High-Load Linear Stage -- L-412
High-Load Linear Stage -- L-417
A new linear stage family with precision balls screws expands PIs product portfolio for industrial solutions. High-performance synchronous servo motors, heavy-duty recirculating ball bearings, and precision rotary and linear encoders...
Extended Travel Linear Air Bearing Slide Extended travel air bearings are ideal for high speed, high accuracy, lightly loaded applications. Unlike other long travel air bearings, the bearing slide is supported only on the ends (similar...
Compact XYZ Motorized Fiber Positioner / Alignment Systemwith Piezoelectric High Speed Photonics Alignment Module -- F-131 F-131 is a unique two stage aligner and provides an especially versatile, compact and modular approach to building high-throughput nano-alignment processes. By combining compact precision motorized stages with a fast...
Linear Air Bearing Slide, PIglide RB -- A-10x For applications that require smooth, precise, linear motion, the PIglide RB series linear air bearings are right for you. These bearings can easily replace ball bearing and crossed roller bearing...
Planar XY Air Bearing Stage For the highest precision applications, Nelson Air has developed a number of Planar XY air bearing stages. These systems use air bearings which ride directly on a granite or aluminum...
XY Piezo Flexure Nanopositioning Stage -- P-542 Piezo flexure stages provide sub-nanometer resolution, frictionless motion and very fast step and settle response. They are used in microscopy, imaging, semiconductor metrology and precision optics applications. PI provides a...
PIglide LC Linear Air Bearing Stage -- A-110 PIglide LC air bearing positioning stages are linear servo motor driven with fully preloaded air bearings and optical linear encoders. The combination of these non-contact components results in a frictionless...
PIglide VC Series Voice Coil Driven Air Bearing Positioner -- A-131 PIglide VC air bearing positioning stages are voice coil driven with fully preloaded air bearings and optical linear encoders. These stages are ideally suited for many high precision applications where...
Precision Z Stage -- L-310 The L-310 vertical translation stage is available with stepper and servo motors and is driven by a precision ground ball screw and guided by cross-roller bearings. A linear scale option...
Cost-Effective Precision Miniature Linear Stage -- L-402 The L-402 is a cost-effective motorized miniature stage equipped with crossed roller bearings for smooth and precise motion. The mini stage is equipped with a direct drive stepper motor or...
Compact Micro-Translation Stage -- M-110 / M-111 / M-112 The M-110, M-111 and M-112 series is is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball...
Precision Micro-Translation Stage -- M-122 The M-122 is a compact, high precision linear stage with integrated linear encoder providing 100 nanometers resolution. It is a bit larger than the M-112 lead screw-driven stage (with motor/gearhead...
PIglide AT1 Compact Linear Air Bearing Stage -- A-121 The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results...
PIglide AT3 Linear Air Bearing Stage -- A-123 The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in...
Planar Scanner with Air Bearing -- A-322 The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as...
Planar Scanner with Air Bearing -- A-311 The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y...
PIglide MB Miniature Linear Air Bearing Stage -- A-141 The PIglide MB air bearing stage is linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. This stage offers ultra-precision in a miniature package.
PIglide Manual X-Y-Tip-Tilt Platform -- A-60X.MTT The PIglide MTT series of manual alignment tabletops can manually adjust a payload mounted to a rotary air bearing in four degrees of freedom, allowing alignment of the payload to...
Linear Positioning Stage -- Q-521
PILine® Linear Positioning Stage -- U-521
The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions. Two linear...
Q-Motion® Miniature Linear Stage -- Q-522 The Q-522 series of economical mini positioning stages are driven by a compact piezo inertia motor. They are offered with travel ranges of 1/4", 1/2", and 1". Featuring dimensions as...
Q-Motion® Precision Linear Stage -- Q-545 The Q-545 mini positioning stage is driven by a high-force stick slip motor, based on a slightly different design compared to the Q-521 and Q-522 stages. A linear encoder is...
Miniature Stage, XY Combination, Ultrasonic Piezo Motor -- U-521 / M-663 The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and...
Low-Profile XY Stage with Ultrasonic Linear Motors -- U-751 / M-686 The U-751/M-686 XY stage is features ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The...
Ultra-Stable XY Motorized Microscope Stage, Controller & Joystick -- U-780 The U-780 is a novel, low-profile precision positioning stage for high-resolution microscopes. It comes complete with a controller and joystick. The motorized stage is based on PI’s patented ultrasonic ceramic...
PILine® XY Stage System with Controller and Joystick -- U-780 / M-687 The U-780/M-687 and U-751/M-686 XY stages are based on ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second...
Linear Stage with Magnetic Direct Drive, Cost-Effective -- V-408 The V-408 stage is small, precise, and affordable as it's equipped with an incremental linear encoder for direct position measurement and a high-force 3-phase linear motor drive. It's well-suited for...
Ultra Precision Elevation Stage -- UPL-120 These piezo-driven, flexure-guided Z-stages are completely frictionless and provide very fast response in the millisecond range. Capacitive feedback provides high resolution and nanometer repeatability. PIHera stages can be combined with...
High Load Precision Motorized Planar XY Positioning Stage -- L-731
High Load Precision Motorized Planar XY Positioning Stage -- L-738
High Load Precision Motorized Planar XY Positioning Stage -- L-741
This low profile, integrated XY linear table is available with stepper and servo motors. Driven by a ball screw and guided by precision anti-creep crossed roller bearings for higher stiffness...
High Speed Precision Motorized Planar XY Positioning Stage -- V-731
High Speed Precision Motorized Planar XY Positioning Stage -- V-738
High Speed Precision Motorized Planar XY Positioning Stage -- V-741
This low-profile integrated XY Table is equipped with ironless, non-cogging linear motors for smooth motion and high velocity to 200mm/sec. Equipped with linear encoders for direct position feedback, the stage...
Direct Drive Linear Motor Stage Family, with Magnetic Direct Drive -- V-508 V-508 stages are compact linear positioning stages configured with high force 3-phase linear motors and crossed roller guides. Options include travel ranges, motor types, and encoders choices that result in...
Piezo Nanopositioning System -- P-750 10 kg Load Capacity 1 Nanometer Lateral Guiding Precision Resolution <1 Nanometer PICMA® High-Performance Multilayer Piezo Drives Fast Response 75 Micron Travel Range Direct Metrology with Capacitive Sensors for...
High-Dynamics Z-Nanopositioner / Scanner -- P-733.Z 100 x 100 Micron Travel Range For XY Scanning & Positioning Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion Precision Flexure-Guiding System Integrated Capacitive Sensors for Resolution...
NanoCube® XYZ Nanopositioning Piezo System -- P-611.3S · P-611.3O 100 x 100 x 100 Micron Travel Range Very Compact: 44 x 44 x 44 mm 1 Nanometer Resolution Ideal for Fiber-Alignment and Photonics Packaging Applications Optional E-760 Controller Card...
High-Resolution Translation Stage -- M-126 25mm Travel Choice of Manual, Closed-Loop Servo and Stepper-Motors Low-Cost, High-Performance Motor Controller Available Crossed Roller Bearings <0.1 Micron Resolution XY and XYZ Combinations Direction-Sensing Origin Switch Non-Contact Limit Switches...
High-Load Precision Z Stage -- M-451 3 Nanometer Design Resolution Closed-Loop ActiveDrive™ DC Motor 12 kg Load Capacity (Self Locking), High Stiffness <100 Nanometer Minimum Incremental Motion 12.5 mm (1/2") Travel Range Choice of Motion Controllers...
PIMars 6-Axis Piezo Stage System -- P-562.6CD 6 motion axes: 3 × linear, 3 × rotational Travel ranges to 200 µm linear and to 1 mrad tilt angle Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology...
Precision Z Stage -- M-501 Closed-Loop ActiveDrive™ DC Motor Travel Range 12.5 mm (1/2") Ultra-High-Resolution Encoder Choice of Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contact Origin and Limit Switches...
XY Microscope Stage with Ultrasonic Linear Drives -- M-545K Closed-Loop Motor Provides Smooth Motion and High Speed to 50 mm/s Travel Ranges 25 x 25mm Integrated Linear Encoders with 0.5µm Resolution 30mm Compact Height Mounts Directly to Microscopes Self-Locking...
PIHera Piezo Linear Stage -- P-620.1 - P-629.1 Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY,...
Precision Linear Stage -- L-509 Compact, High Precision Stage Stepper Motor and DC Motor Options 1, 2 and 4” Travel (26mm, 52mm and 102mm Repeatability to 0.05 µm Linear Encoder Option Direction-Sensing Home Switch Optical...
Miniature Piezo Slide -- Q-522 Extremely Compact Open and Closed-Loop Piezo Drives for Nanometer Precision X, XY and XYZ Combinations and Rotation
High-Dynamic PIMag® Linear Stage -- V-522 / V-524 / V-528 Fast scanning and positioning Travel ranges 5 mm, 10 mm, 20 mm Scanning frequencies of more than 10 Hz Max. velocity 250 mm/s crossed roller bearings for the highest precision...
PIFOC® High-Dynamics Piezo Scanner -- P-725.xDD Fastest settling time under 5 ms with microscope objective Travel range 18 µm Scans and positions objectives with sub-nm resolution Parallel flexure guiding for minimized objective offset Direct metrology with...
6-Axis Precision Piezo Stage -- P-587 For scanning and positioning in X, Y, Z, θX, θY, θZ 800 µm × 800 µm × 200 µm linear range Up to 1 mrad...
Linear Piezo Scanner -- P-712 High dynamics, to 5 ms settling time Travel range up to 40 µm Resolution to 0.2 nm Compact design with low profile, 40 mm x 40 mm x 6 mm...
PIFOC® Specimen-Focusing Z Stage -- P-737 High-Speed Piezo Z-Motion with Travel Ranges to 250 µm Nanometer Resolution Large Clear Aperture to Accommodate Specimen Holders Perfect Mechanical Fit to XY OEM Manual or Motorized Stages Sub-Millisecond Response...
XY(Z) Piezo Nanopositioning Stage -- P-733.2 / P-733.3 Higher Speed Through Direct Drive Up to 2.2 kHz Resonant Frequency in X and Y 30 x 30 or 30 x 30 x 10 Micron Travel Range 100 Picometers Resolution...
Compact XYZ Piezo Scanner with Digital Servo Piezo Controller System -- P-616 Highest Stiffness from Parallel-Kinematic Design 100µm Travel in Compact Design (40x40x40 mm) Unidirectional repeatability <0.2nm Capacitative Sensors PICMA® High-Performance Multilayer Piezo Actuators Extremely Lighweight at 0.08kg Ideal for Fast...
PicoCube XY(Z) Piezo Scanner -- P-313 Highly Linear Piezo Material Does not Require Closed-Loop Operation Faster Response, Higher Bandwidth 20 pm Resolution Up to 1 µm Travel
Nano-Precision Heavy-Duty Stage -- M-511.HD1 Hybrid System Combines Advantages of Piezoelectrics and Electromagnetic Drives 2 Nanometer Linear Encoder Resolution 100 mm Travel Velocities to 125 mm/sec Active Compensation of Stick/Slip During Startup and Settling Active...
XY Piezo Scanner -- P-713 Ideal for Interlacing, CCD Resolution Enhancement Compact Size of only 45 x 45 x 6 mm Clear Aperture Low Cost - Efficient Design 15 x 15 Micron Travel Range Parallel...
High-Accuracy Translation Stage -- M-605 Integrated Linear-Scale Encoders for Highest Accuracy Travel Ranges 25 mm (1") and 50 mm (2") Velocity up to 50 mm/sec. Active Drive™ Motors Choice of Motion Controllers Stress-Relieved Aluminum Stage...
PIglide AT XY Air Bearing Stage Series Load to 35g Velocity to 1m/s, Acceleration to 2g's Straightness/Flatness to 0.50µm
XY Piezo Stage -- P-541.2 / P-542.2 Low profile for easy integration: 16.5 mm Clear aperture 80 mm × 80 mm Travel range to 200 µm × 200 µm Enhanced responsiveness & multi-axis precision: Parallel kinematics /...
Low-Profile, Scanning Microscopy XY Piezo Stages with Parallel Metrology -- P-542.2CD Low Profile for Easy Integration: 16.5 mm Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion Choice of Strain Gauge (Lower Cost)...
PI Nano® XY & XYZ Piezo Stage for Microscopy with Controller -- P-545 Low Profile for Easy Integration: 20 mm (0.8") Large Aperture for 1x3"Slides. Accessories & Holders Available All Parts Black Anodized for Minimum Reflections 200µm Standard Travel Range, Longer Ranges Available...
Large Aperture Z-Tip-Tilt Piezo Stage, Low Profile -- P-541 Low profile piezo tip tilt stages are available with apertures to 100 mm and more. Custom stages are also available.
Low-Profile Z-Tip-Tilt (Pitch/Roll) Piezo Flexure Stage with Parallel Metrology -- P-541.ZCD
Piezo Z and Z / Tip / Tilt Stage -- P-541.Z
Lower Profile for Easy Integration: 16.5 mm Z and Tip/Tilt Versions Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance) 100 Micron Linear Travel Range, 1 milliradian Tilt...
XY Positioning Scan Table -- MS-4 Motorized Positioning Range: 102 x 102 millimeters Maximum Load: 3 kg Maximum Velocity: 90 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.25 micrometers unidirectional +/- 0.5 micrometers bidirectional Linear...
Miniature Linear Stage -- MTS-65 Motorized Positioning Range: 13 to 52 millimeters Maximum Load: 2 kg Maximum Velocity: 10 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.1 micrometers unidirectional 0.2 micrometers bidirectional Linear Position...
Linear Stage -- LS-270 Motorized Positioning Range: 155 to 1016mm Maximum Load: 150 kg Maximum Velocity: 150 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.05 micrometers unidirectional +/- 0.04 micrometers bidirectional Linear Position...
Linear Motor Stage -- LMS-180 Motorized Positioning Range: 155 to 508 millimeters Direct Drive for High Speed Maximum Load: 25 kg Maximum Velocity: 500 mm/second Maximum Positioning Resolution: 0.015 micrometers Position Reproducibility: 0.05 micrometers unidirectional...
Linear Stage -- LS-180
Linear Stage -- LS-180 Series
Motorized Positioning Range: 155 to 508 millimeters Maximum Load: 100 kg Maximum Velocity: 200 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.05 micrometers unidirectional 0.1 micrometers bidirectional Linear Position...
Translation Stage -- VT-80 Motorized Positioning Range: 25 to 300 millimeters Maximum Load: 5 kg Maximum Velocity: 20 mm/second Maximum Positioning Resolution: 0.2 micrometers Position Reproducibility: 0.4 micrometers unidirectional +/ 10 micrometers bidirectional
High-Precision Linear Positioning Stage -- L-511 Motorized Positioning Range: 52 mm (2“), 102 mm (4“), 155 mm (6“) Maximum Load: 10 kg (22 lbs) Maximum Velocity: 45 mm/second Maximum Linear Encoder Resolution: 1 nanometer Minimum Incremental...
High Precision Stage -- HPS-170 Motorized Positioning Range: 52 to 305 millimeters Maximum Load: 35 kg Maximum Velocity: 90 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.05 micrometers unidirectional +/- 0.05 micrometers bidirectional Linear...
PIMars™ XYZ Piezo System -- P-561 · P-562 · P-563 Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 340 x 340 x 340 µm Capacitive Sensors for Highest Linearity Frictionless, High-Precision Flexure Guiding System Excellent Scanning...
PIFOC® Nosepiece Nanopositioner -- P-721KTPZ Positioning and scanning of microscope turrets Direct-metrology capacitive sensors for best linearity, stability and control dynamics Frictionless, high-precision flexure guiding system for better focus stability Outstanding lifetime due to PICMA...
Piezo Z / Tip / Tilt Stage -- P-518 / P-528 / P-558 Precision Trajectory Control Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 Micron / 4 milliradian Clear Aperture 66 x 66 mm Direct Metrology with Capacitive Sensors for...
Piezo Scanner Tubes -- PT230 Radial and axial displacement Subnanometer resolution Ideal for OEM applications Large choice of designs UHV-compatible to 10-9 hPa Piezo actuator / scanner tube Bipolar operating voltage up to ±250...
High-Dynamics Nanopositioning System -- P-630 Resonant frequency to 3.25 kHz Travel ranges to 80 µm Small footprint and low-profile height Clear aperture with 30 mm diameter Reference-class nanopositioning system 1 axis. Frictionless flexure-guided design, directly...
Power-PIFOC® Nosepiece Nanopositioner -- P-721KPTZ Scans and positions objectives with sub-nm resolution Travel ranges to 150 µm ms-Einschwingzeit Parallel precision flexure guiding for better focus stability Direct metrology with capacitive sensors for highest linearity Outstanding...
Compact Z and XZ Piezoelectric Nanopositioning Stage -- P-611.ZS · P-611.XZS Small Footprint: 44 x 44 mm 100 Micron Travel Range Resolution to 0.2 Nanometer For Cost-Sensitive Applications PICMA® High-Performance Multilayer Piezo Actuators Open- and Closed-Loop Models
Low Cost X and XY Piezoelectric Nanopositioning System -- P-611.1 · P-611.2 Small Footprint: 44 x 44 mm 100 Micron Travel Range Resolution to 0.2 Nanometer For Cost-Sensitive Applications PICMA® High-Performance Multilayer Piezo Actuators Z-Stage also Available
Open-Frame Microscope Stage -- M-545 Stable platform for P-545 PInano® piezo nanopositioning systems Low profile for easy integration: 30 mm Travel range 25 mm × 25 mm Micrometer screws, motor upgrade available For inverted microscopes...
PInano® Z Microscopy Scanner -- P-736 Step-and-settle to 5 ms Low profile for easy integration Travel range 100 µm or 200 µm Clear aperture 93 mm × 65 mm Compatible with MetaMorph imaging software Cost-efficient due...
Piezo Z Stage -- P-612.Z Travel range 100 µm Resolution to 0.2 nm Linearity error 0.2 % Compact: Footprint 60 mm x 60 mm Very cost-effective controller / piezomechanics systems Frictionless, high-precision flexure guiding system...
Compact XY Nanopositioning System -- P-763 Travel range 200 µm High positional stability and resolution with capacitive sensors Small footprint with a 70 mm side length Large clear aperture 30 mm × 30 mm Precision-class nanopositioning...
Compact Linear Stage -- L-406 Travel Range from 26 to 102 mm (1” to 4”) Position Repeatability to 0.2 microns Velocity Up to 20mm/sec Load Capacity to 10kg (22lbs) Integrated Optical Limit Switch
High-Precision Linear Translation Stage -- M-511 / M-521 / M-531 Travel ranges 102, 204 and 306 mm (4”, 8”, 12”) Max. velocity up to 100 mm/s Encoder resolution 50 nm Load capacity to 100 kg Zero-backlash ball screws XY &
High-Load Precision Stage -- M-413
High-Load Precision Stage -- M-414
Precision Translation Stage -- M-403
Precision Translation Stage -- M-404
Travel Ranges from 25 to 300 mm Cost-Effective Design Modular System with 4 Series: M-403, M-404, M-413, M-414 Preloaded Leadscrews or Recirculating Ball Screws Stress-Relieved Aluminum Base 80 and 120...
Linear Motor Stage -- LMS-270 Travel ranges to 1016 mm (40") Velocity to 800 mm/s Incremental encoder with 15 nm resolution 480 N peak force Reference-class linear stage High travel accuracy with recirculating ball bearings.
Precision Linear Stage -- M-406 Travel Ranges to 150 mm Stress-Relieved Aluminum Stage Base for Highest Stability Crossed Roller Bearings Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option Choice of Motion Controllers Non-Contact Direction-Sensing Origin Switch...
PIMag® Precision Linear Stage -- V-551 Travel ranges to 230 mm Velocity up to 0.5 m/s Absolute encoder with 1 nm resolution Excellent guiding accuracy Compact design with 160 mm width Reference-class linear stage Thanks to...
High Precision Nanopositioning Stage -- P-752 Ultra-Fast Response Ultra-Precise Trajectory Control Digital Controllers with Fast FiberLink Interface Available ID-Chip for AutoCalibrate Function Direct-Metrology Capacitive Sensors for Highest Precision 0.1 nm Resolution PICMA® High-Performance Multilayer Piezo...
PicoCube XY(Z) Piezo Scanner -- P-363 Ultra-High-Performance Closed-Loop Scanner for AFM/SPM Compact Manipulation Tool for Nanotechnology Resonant Frequency 9.8 kHz Ultra-High-Precision Capacitive Feedback Parallel-Motion Metrology for Highest Linearity and Stability 50 Picometers Resolution 5 x 5...
Linear Positioner -- N-565 Ultraprecision: 2 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution Long travel ranges: 13 mm, 26 mm or 52 mm Self-locking when switched off: Saves energy...
LISA Linear Actuator & Stage -- P-753 Unique Design: Both Piezo-Stage and Piezo Actuator Frictionless Precision Flexure Guiding System 0.05 nm Resolution Direct Metrology with Capacitive Sensors for Highest Precision Ultra-Fast Response, Very Compact PICMA® High-Performance...
Multi-Axis Piezo Scanner -- P-517 / P-527 XYΘ, XYZ and XY Versions Precision Trajectory Control Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 Micron Clear Aperture to 66 x 66 mm PICMA® High-Performance...
PIHera XY Piezo Stage -- P-620.2 - P-629.2 XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to...
PIHera™ Family of Piezo-Z Nanopositioning Stages, Closed-Loop, Direct Metrology -- P-620.Z · P-621.Z · P-622.Z Z-Axis Travel to 400 Micron Low Profile Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision 0.02%...