PI (Physik Instrumente) L.P. Datasheets for Linear Slides and Linear Stages

Linear slides are simple linear motion devices composed of a stationary base and a moving carriage. Linear stages are slides with a drive mechanism that provide controlled, precise positioning along a linear axis.
Linear Slides and Linear Stages: Learn more

Product Name Notes
Crossed roller guide With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer...
Precision-class XY stage PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy...
Product overview Compact linear stage with low-backlash leadscrew and ball guides. Directly mountable XY combination. Integrated reference point and limit switches: Hall effect. The linear stage is available in two...
Reference-class microscope XY stage System with controller and joystick. Large clear aperture 160 mm × 110 mm. Suitable for the following inverted microscopes: Nikon Eclipse Ti-E/Ti-U/Ti-S Olympus IX2 Leica DMI...
Compact industrial design for applications with low power requirements The V-855 is a heavy-duty and highly dynamic linear stage for industrial applications. Its design is consistently geared to demanding industrial...
Industrial design for high performance and high load The V-857 is a heavy-duty and highly dynamic linear stage for industrial applications. Its design is consistently geared to demanding industrial conditions...
KEY FEATURES Travel r ange up to 1016 mm (40") Uni-directional repeatability do wn to 0.05 μm Maximum speed 150 mm/sec Load capacity up to 150 kg Integr ated inductiv...
A new linear stage family with linear motors expands PI's product portfolio for industrial solutions. High-performance ironless linear motors, heavy-duty recirculating ball bearings, and precision linear encoders are used. The...
A new linear stage family with precision balls screws expands PIs product portfolio for industrial solutions. High-performance synchronous servo motors, heavy-duty recirculating ball bearings, and precision rotary and linear encoders...
Compact linear stage, versatile in use Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly...
Compact Z stage, versatile in useZ stage with compact size due to folded drive with belt drive. Fits onto linear stages with M6 50 mm × 50 mm connection spacing...
Extended travel air bearings are ideal for high speed, high accuracy, lightly loaded applications. Unlike other long travel air bearings, the bearing slide is supported only on the ends (similar...
F-131 is a unique two stage aligner and provides an especially versatile, compact and modular approach to building high-throughput nano-alignment processes. By combining compact precision motorized stages with a fast...
For applications that require smooth, precise, linear motion, the PIglide RB series linear air bearings are right for you. These bearings can easily replace ball bearing and crossed roller bearing...
For the highest precision applications, Nelson Air has developed a number of Planar XY air bearing stages. These systems use air bearings which ride directly on a granite or aluminum...
High travel accuracy and load capacity due to crossed roller guides with anti-creep system. Precision ball screw with 1 mm pitch. Compact design. Stress-relieved aluminum base for highest stability. Limit...
Piezo flexure stages provide sub-nanometer resolution, frictionless motion and very fast step and settle response. They are used in microscopy, imaging, semiconductor metrology and precision optics applications. PI provides a...
PIglide LC air bearing positioning stages are linear servo motor driven with fully preloaded air bearings and optical linear encoders. The combination of these non-contact components results in a frictionless...
PIglide VC air bearing positioning stages are voice coil driven with fully preloaded air bearings and optical linear encoders. These stages are ideally suited for many high precision applications where...
Precision-class linear positioning stagePILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy...
Precision-class Z stageHigh guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for highest stability. 2-phase stepper motor for high torque even at low...
Reference-class linear stage A new linear stage family with linear motors expands PI's product portfolio for industrial solutions. High-performance ironless linear motors, heavy-duty recirculating ball bearings, and precision linear encoders...
Standard-class linear stage Recirculating ball bearings and precision leadscrew for smooth and even feed. Stress-relieved aluminum base for highest stability. Compact XY combinations. Two mechanical limit switches.
The L-310 vertical translation stage is available with stepper and servo motors and is driven by a precision ground ball screw and guided by cross-roller bearings. A linear scale option...
The L-402 is a cost-effective motorized miniature stage equipped with crossed roller bearings for smooth and precise motion. The mini stage is equipped with a direct drive stepper motor or...
The M-110, M-111 and M-112 series is is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball...
The M-122 is a compact, high precision linear stage with integrated linear encoder providing 100 nanometers resolution. It is a bit larger than the M-112 lead screw-driven stage (with motor/gearhead...
The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results...
The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in...
The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as...
The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y...
The PIglide MB air bearing stage is linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. This stage offers ultra-precision in a miniature package.
The PIglide MTT series of manual alignment tabletops can manually adjust a payload mounted to a rotary air bearing in four degrees of freedom, allowing alignment of the payload to...
The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions. Two linear...
The Q-522 series of economical mini positioning stages are driven by a compact piezo inertia motor. They are offered with travel ranges of 1/4", 1/2", and 1". Featuring dimensions as...
The Q-545 mini positioning stage is driven by a high-force stick slip motor, based on a slightly different design compared to the Q-521 and Q-522 stages. A linear encoder is...
The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and...
The U-751/M-686 XY stage is features ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The...
The U-780 is a novel, low-profile precision positioning stage for high-resolution microscopes. It comes complete with a controller and joystick. The motorized stage is based on PI’s patented ultrasonic ceramic...
The U-780/M-687 and U-751/M-686 XY stages are based on ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second...
The V-408 stage is small, precise, and affordable as it's equipped with an incremental linear encoder for direct position measurement and a high-force 3-phase linear motor drive. It's well-suited for...
The XYZ setup of the fiber alignment system consists of three motorized linear stages from the M-122 series for linear motion, and the WT-85 and WT-100 goniometers for angular motion.
These piezo-driven, flexure-guided Z-stages are completely frictionless and provide very fast response in the millisecond range. Capacitive feedback provides high resolution and nanometer repeatability. PIHera stages can be combined with...
This low profile, integrated XY linear table is available with stepper and servo motors. Driven by a ball screw and guided by precision anti-creep crossed roller bearings for higher stiffness...
This low-profile integrated XY Table is equipped with ironless, non-cogging linear motors for smooth motion and high velocity to 200mm/sec. Equipped with linear encoders for direct position feedback, the stage...
V-508 stages are compact linear positioning stages configured with high force 3-phase linear motors and crossed roller guides. Options include travel ranges, motor types, and encoders choices that result in...
With the V-817, PI has a linear stage in its portfolio for industrial solutions that has a high load capacity and high dynamics. Its design is consistently geared to demanding...
XY stage for the price-sensitive OEM market The M-971 is integrated into systems for inspection, lithography, or biomedical engineering and is optimized for optical microscopy. It was specially developed to...
10 kg Load Capacity 1 Nanometer Lateral Guiding Precision Resolution <1 Nanometer PICMA® High-Performance Multilayer Piezo Drives Fast Response 75 Micron Travel Range Direct Metrology with Capacitive Sensors for...
100 x 100 Micron Travel Range For XY Scanning & Positioning Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion Precision Flexure-Guiding System Integrated Capacitive Sensors for Resolution...
100 x 100 x 100 Micron Travel Range Very Compact: 44 x 44 x 44 mm 1 Nanometer Resolution Ideal for Fiber-Alignment and Photonics Packaging Applications Optional E-760 Controller Card...
25mm Travel Choice of Manual, Closed-Loop Servo and Stepper-Motors Low-Cost, High-Performance Motor Controller Available Crossed Roller Bearings <0.1 Micron Resolution XY and XYZ Combinations Direction-Sensing Origin Switch Non-Contact Limit Switches...
3 Nanometer Design Resolution Closed-Loop ActiveDrive™ DC Motor 12 kg Load Capacity (Self Locking), High Stiffness <100 Nanometer Minimum Incremental Motion 12.5 mm (1/2") Travel Range Choice of Motion Controllers...
6 motion axes: 3 × linear, 3 × rotational Travel ranges to 200 µm linear and to 1 mrad tilt angle Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology...
Closed-Loop ActiveDrive™ DC Motor Travel Range 12.5 mm (1/2") Ultra-High-Resolution Encoder Choice of Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ball screws Non-Contact Origin and Limit...
Closed-Loop Motor Provides Smooth Motion and High Speed to 50 mm/s Travel Ranges 25 x 25mm Integrated Linear Encoders with 0.5µm Resolution 30mm Compact Height Mounts Directly to Microscopes Self-Locking...
Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY,...
Compact, High Precision Stage Stepper Motor and DC Motor Options 1, 2 and 4” Travel (26mm, 52mm and 102mm Repeatability to 0.05 µm Linear Encoder Option Direction-Sensing Home Switch Optical...
Extremely Compact Open and Closed-Loop Piezo Drives for Nanometer Precision X, XY and XYZ Combinations and Rotation
Fast scanning and positioning Travel ranges 5 mm, 10 mm, 20 mm Scanning frequencies of more than 10 Hz Max. velocity 250 mm/s crossed roller bearings for the highest precision...
Fastest settling time under 5 ms with microscope objective Travel range 18 µm Scans and positions objectives with sub-nm resolution Parallel flexure guiding for minimized objective offset Direct metrology with...
For scanning and positioning in X, Y, Z, θX, θY, θZ 800 µm × 800 µm × 200 µm linear range Up to 1 mrad...
High dynamics, to 5 ms settling time Travel range up to 40 µm Resolution to 0.2 nm Compact design with low profile, 40 mm x 40 mm x 6 mm...
High-Speed Piezo Z-Motion with Travel Ranges to 250 µm Nanometer Resolution Large Clear Aperture to Accommodate Specimen Holders Perfect Mechanical Fit to XY OEM Manual or Motorized Stages Sub-Millisecond Response...
Higher Speed Through Direct Drive Up to 2.2 kHz Resonant Frequency in X and Y 30 x 30 or 30 x 30 x 10 Micron Travel Range 100 Picometers Resolution...
Highest Stiffness from Parallel-Kinematic Design 100µm Travel in Compact Design (40x40x40 mm) Unidirectional repeatability <0.2nm Capacitative Sensors PICMA® High-Performance Multilayer Piezo Actuators Extremely Lighweight at 0.08kg Ideal for Fast...
Highly Linear Piezo Material Does not Require Closed-Loop Operation Faster Response, Higher Bandwidth 20 pm Resolution Up to 1 µm Travel
Hybrid System Combines Advantages of Piezoelectric and Electromagnetic Drives 2 Nanometer Linear Encoder Resolution 100 mm Travel Velocities to 125 mm/sec Active Compensation of Stick/Slip During Startup and Settling Active...
Ideal for Interlacing, CCD Resolution Enhancement Compact Size of only 45 x 45 x 6 mm Clear Aperture Low Cost - Efficient Design 15 x 15 Micron Travel Range Parallel...
Integrated Linear-Scale Encoders for Highest Accuracy Travel Ranges 25 mm (1") and 50 mm (2") Velocity up to 50 mm/sec. Active Drive™ Motors Choice of Motion Controllers Stress-Relieved Aluminum Stage...
Load to 35g Velocity to 1m/s, Acceleration to 2g's Straightness/Flatness to 0.50µm
Low profile for easy integration: 16.5 mm Clear aperture 80 mm × 80 mm Travel range to 200 µm × 200 µm Enhanced responsiveness & multi-axis precision: Parallel kinematics /...
Low Profile for Easy Integration: 16.5 mm Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion Choice of Strain Gauge (Lower Cost)...
Low Profile for Easy Integration: 20 mm (0.8") Large Aperture for 1x3"Slides. Accessories & Holders Available All Parts Black Anodized for Minimum Reflections 200µm Standard Travel Range, Longer Ranges Available...
Low profile piezo tip tilt stages are available with apertures to 100 mm and more. Custom stages are also available.
Lower Profile for Easy Integration: 16.5 mm Z and Tip/Tilt Versions Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance) 100 Micron Linear Travel Range, 1 milliradian Tilt...
Motorized Positioning Range: 102 x 102 millimeters Maximum Load: 3 kg Maximum Velocity: 90 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.25 micrometers unidirectional +/- 0.5 micrometers bidirectional Linear...
Motorized Positioning Range: 13 to 52 millimeters Maximum Load: 2 kg Maximum Velocity: 10 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.1 micrometers unidirectional 0.2 micrometers bidirectional Linear Position...
Motorized Positioning Range: 155 to 1016mm Maximum Load: 150 kg Maximum Velocity: 150 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.05 micrometers unidirectional +/- 0.04 micrometers bidirectional Linear Position...
Motorized Positioning Range: 155 to 508 millimeters Direct Drive for High Speed Maximum Load: 25 kg Maximum Velocity: 500 mm/second Maximum Positioning Resolution: 0.015 micrometers Position Reproducibility: 0.05 micrometers unidirectional...
Motorized Positioning Range: 155 to 508 millimeters Maximum Load: 100 kg Maximum Velocity: 200 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.05 micrometers unidirectional 0.1 micrometers bidirectional Linear Position...
Motorized Positioning Range: 25 to 300 millimeters Maximum Load: 5 kg Maximum Velocity: 20 mm/second Maximum Positioning Resolution: 0.2 micrometers Position Reproducibility: 0.4 micrometers unidirectional +/ 10 micrometers bidirectional
Motorized Positioning Range: 52 mm (2“), 102 mm (4“), 155 mm (6“) Maximum Load: 10 kg (22 lbs) Maximum Velocity: 45 mm/second Maximum Linear Encoder Resolution: 1 nanometer Minimum Incremental...
Motorized Positioning Range: 52 to 305 millimeters Maximum Load: 35 kg Maximum Velocity: 90 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.05 micrometers unidirectional +/- 0.05 micrometers bidirectional Linear...
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 340 x 340 x 340 µm Capacitive Sensors for Highest Linearity Frictionless, High-Precision Flexure Guiding System Excellent Scanning...
Precision Trajectory Control Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 Micron / 4 milliradian Clear Aperture 66 x 66 mm Direct Metrology with Capacitive Sensors for...
Radial and axial displacement Sub nanometer resolution Ideal for OEM applications Large choice of designs UHV-compatible to 10-9 hPa Piezo actuator / scanner tube Bipolar operating voltage up to...
Resonant frequency to 3.25 kHz Travel ranges to 80 µm Small footprint and low-profile height Clear aperture with 30 mm diameter Reference-class Nano positioning system 1 axis. Frictionless flexure-guided design,...
Small Footprint: 44 x 44 mm 100 Micron Travel Range Resolution to 0.2 Nanometer For Cost-Sensitive Applications PICMA® High-Performance Multilayer Piezo Actuators Open- and Closed-Loop Models
Small Footprint: 44 x 44 mm 100 Micron Travel Range Resolution to 0.2 Nanometer For Cost-Sensitive Applications PICMA® High-Performance Multilayer Piezo Actuators Z-Stage also Available
Stable platform for P-545 PInano® piezo Nano positioning systems Low profile for easy integration: 30 mm Travel range 25 mm × 25 mm Micrometer screws, motor upgrade available For inverted...
Step-and-settle to 5 ms Low profile for easy integration Travel range 100 µm or 200 µm Clear aperture 93 mm × 65 mm Compatible with MetaMorph imaging software Cost-efficient due...
Travel range 100 µm Resolution to 0.2 nm Linearity error 0.2 % Compact: Footprint 60 mm x 60 mm Very cost-effective controller / piezo mechanics systems Frictionless, high-precision flexure guiding...
Travel range 200 µm High positional stability and resolution with capacitive sensors Small footprint with a 70 mm side length Large clear aperture 30 mm × 30 mm Precision-class Nano...
Travel Range from 26 to 102 mm (1” to 4”) Position Repeatability to 0.2 microns Velocity Up to 20mm/sec Load Capacity to 10kg (22lbs) Integrated Optical Limit Switch
Travel ranges 102, 204 and 306 mm (4”, 8”, 12”) Max. velocity up to 100 mm/s Encoder resolution 50 nm Load capacity to 100 kg Zero-backlash ball screws XY &
Travel Ranges from 25 to 300 mm Cost-Effective Design Modular System with 4 Series: M-403, M-404, M-413, M-414 Preloaded Leadscrews or Recirculating Ball Screws Stress-Relieved Aluminum Base 80 and 120...
Travel ranges to 1016 mm (40") Velocity to 800 mm/s Incremental encoder with 15 nm resolution 480 N peak force Reference-class linear stage High travel accuracy with recirculating ball bearings.
Travel Ranges to 150 mm Stress-Relieved Aluminum Stage Base for Highest Stability Crossed Roller Bearings Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option Choice of Motion Controllers Non-Contact Direction-Sensing Origin Switch...
Travel ranges to 230 mm Velocity up to 0.5 m/s Absolute encoder with 1 nm resolution Excellent guiding accuracy Compact design with 160 mm width Reference-class linear stage Thanks to...
Ultra-Fast Response Ultra-Precise Trajectory Control Digital Controllers with Fast FiberLink Interface Available ID-Chip for AutoCalibrate Function Direct-Metrology Capacitive Sensors for Highest Precision 0.1 nm Resolution PICMA® High-Performance Multilayer Piezo...
Ultra-High-Performance Closed-Loop Scanner for AFM/SPM Compact Manipulation Tool for Nanotechnology Resonant Frequency 9.8 kHz Ultra-High-Precision Capacitive Feedback Parallel-Motion Metrology for Highest Linearity and Stability 50 Picometers Resolution 5 x 5...
Ultraprecision: 2 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution Long travel ranges: 13 mm, 26 mm or 52 mm Self-locking when switched off: Saves energy...
Unique Design: Both Piezo-Stage and Piezo Actuator Frictionless Precision Flexure Guiding System 0.05 nm Resolution Direct Metrology with Capacitive Sensors for Highest Precision Ultra-Fast Response, Very Compact PICMA® High-Performance...
XYΘ, XYZ and XY Versions Precision Trajectory Control Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 Micron Clear Aperture to 66 x 66 mm PICMA® High-Performance...
XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to...
Z-Axis Travel to 400 Micron Low Profile Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision 0.02%...