PI (Physik Instrumente) L.P. Datasheets for Linear Slides and Linear Stages
Linear slides are simple linear motion devices composed of a stationary base and a moving carriage. Linear stages are slides with a drive mechanism that provide controlled, precise positioning along a linear axis.
Linear Slides and Linear Stages: Learn more
| Product Name | Notes |
|---|---|
| Basic Version for Universal Fields of Use Suitable for vacuum up to 10-6 hPa Travel ranges between 25 and 300 mm Low profile Max. Velocity to 10 mm/s Load capacity... | |
| Clear Aperture, High Travel Accuracy and Stability, Linear Motors Travel range 102 mm × 102 mm (4") Large aperture, 150 mm × 150 mm Unidirectional repeatability to 0.1 µm Velocity... | |
| Fast, Compact, and Highly Precise Travel ranges to ±17 mm / ±21° Load capacity to 5 kg Repeatability to ±0.06 µm Velocity to 10 mm/s Vacuum version available Fields of... | |
| For Inverted Microscopes from Nikon, Olympus, Zeiss, and Leica High velocity constancy at 10 µm/s Velocity up to 120 mm/s, sensor resolution 10 nm Travel range 128 mm × 86... | |
| For Loads to 60 kg Low-wear, brushless DC motors Travel ranges to 300 mm in X and Y and up to 170 mm in Z Tilt and rotation angle to... | |
| High Travel Accuracy and Stability, Linear Motor Travel range 205 mm × 205 mm (8") Unidirectional repeatability to 0.1 µm Ironless 3-phase linear motor Velocity to 200 mm/s Incremental linear... | |
| Inexpensive and High Precision Up to 20 nanometer steps Load capacity to 40 kg Travel ranges to ±50 mm / ±30° Repeatability to ±0.1 µm BLDC motors Works in any... | |
| XY(Z) Combinations with a Variety of Drives and Travel Ranges Very compact due to folded drive Stepper motors and closed-loop DC motors Noncontact reference and limit switches XY setups can... | |
| Flexible adaption The construction allows flexible adaption to the requirements. Technically sophisticated and cost-critical applications can be equally served with different travel ranges, drives, and measuring systems. XY assemblies are... | |
| Overview The MGS gantry system has been designed to maximize throughput for applications requiring overhead motion. This stage is ideal for 3D printing, assembly, pick-and-place, alignment, inspection, and industrial automation... | |
| Precision-class XY stage PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy... | |
| Product overview Compact linear stage with low-backlash leadscrew and ball guides. Directly mountable XY combination. Integrated reference point and limit switches: Hall effect. The linear stage is available in two... | |
| Product overview The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The... | |
| Reference-class microscope XY stage System with controller and joystick. Large clear aperture 160 mm × 110 mm. Suitable for the following inverted microscopes: Nikon Eclipse Ti-E/Ti-U/Ti-S Olympus IX2 Leica DMI... | |
| Compact industrial design for applications with low power requirements The V-855 is a heavy-duty and highly dynamic linear stage for industrial applications. Its design is consistently geared to demanding industrial... | |
| Industrial design for high performance and high load The V-857 is a heavy-duty and highly dynamic linear stage for industrial applications. Its design is consistently geared to demanding industrial conditions... | |
| Industrial design for high performance and high load With the V-817, PI has a linear stage in its portfolio for industrial solutions that has a high load capacity and high... | |
| KEY FEATURES Travel r ange up to 1016 mm (40") Uni-directional repeatability do wn to 0.05 μm Maximum speed 150 mm/sec Load capacity up to 150 kg Integr ated inductiv... | |
| Powerful linear stage for use in demanding industrial applications Precision ball screws, high-performance stepper or synchronous servo motors, heavy-duty recirculating ball bearings, and precision rotary encoders enable continuous and reliable... | |
| Precision-class linear stage The L-836 linear stage series with precision ball screw is suited for industrial applications that require high performance in compact design. High-performance is achieved by high resolution... | |
| Product Overview: V-827 direct-drive linear stages are designed for high load, high throughput applications that also require long life, and high reliability. The V-827 family of direct-drive stages offer superior... | |
| A new linear stage family with linear motors expands PI's product portfolio for industrial solutions. High-performance ironless linear motors, heavy-duty recirculating ball bearings, and precision linear encoders are used. The... | |
| A new linear stage family with precision balls screws expands PIs product portfolio for industrial solutions. High-performance synchronous servo motors, heavy-duty recirculating ball bearings, and precision rotary and linear encoders... | |
| Compact linear stage, versatile in use Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly... | |
| Compact Z stage, versatile in useZ stage with compact size due to folded drive with belt drive. Fits onto linear stages with M6 50 mm × 50 mm connection spacing... | |
| Extended travel air bearings are ideal for high speed, high accuracy, lightly loaded applications. Unlike other long travel air bearings, the bearing slide is supported only on the ends (similar... | |
| F-131 is a unique two stage aligner and provides an especially versatile, compact and modular approach to building high-throughput nano-alignment processes. By combining compact precision motorized stages with a fast... | |
| For applications that require smooth, precise, linear motion, the PIglide RB series linear air bearings are right for you. These bearings can easily replace ball bearing and crossed roller bearing... | |
| High travel accuracy and load capacity due to crossed roller guides with anti-creep system. Precision ball screw with 1 mm pitch. Compact design. Stress-relieved aluminum base for highest stability. Limit... | |
| PICMAWalk is the longest-lasting piezo-motorized drive principle on the market. The lifetime of the drives is verifiably more than 100 km under atmospheric conditions. Even under vacuum conditions, a cumulative... | |
| PIglide LC air bearing positioning stages are linear servo motor driven with fully preloaded air bearings and optical linear encoders. The combination of these non-contact components results in a frictionless... | |
| PIglide VC air bearing positioning stages are voice coil driven with fully preloaded air bearings and optical linear encoders. These stages are ideally suited for many high precision applications where... | |
| Precision-class linear positioning stagePILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy... | |
| Precision-class Z stageHigh guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for highest stability. 2-phase stepper motor for high torque even at low... | |
| Reference-class linear stage A new linear stage family with linear motors expands PI's product portfolio for industrial solutions. High-performance ironless linear motors, heavy-duty recirculating ball bearings, and precision linear encoders... | |
| Standard-class linear stage Recirculating ball bearings and precision leadscrew for smooth and even feed. Stress-relieved aluminum base for highest stability. Compact XY combinations. Two mechanical limit switches. | |
| The L-310 vertical translation stage is available with stepper and servo motors and is driven by a precision ground ball screw and guided by cross-roller bearings. A linear scale option... | |
| The M-110, M-111 and M-112 series is is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball... | |
| The M-122 is a compact, high precision linear stage with integrated linear encoder providing 100 nanometers resolution. It is a bit larger than the M-112 lead screw-driven stage (with motor/gearhead... | |
| The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results... | |
| The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in... | |
| The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as... | |
| The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y... | |
| The PIglide MB air bearing stage is linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. This stage offers ultra-precision in a miniature package. | |
| The PIglide MTT series of manual alignment tabletops can manually adjust a payload mounted to a rotary air bearing in four degrees of freedom, allowing alignment of the payload to... | |
| The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions. Two linear... | |
| The Q-522 series of economical mini positioning stages are driven by a compact piezo inertia motor. They are offered with travel ranges of 1/4", 1/2", and 1". Featuring dimensions as... | |
| The Q-545 mini positioning stage is driven by a high-force stick slip motor, based on a slightly different design compared to the Q-521 and Q-522 stages. A linear encoder is... | |
| The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and... | |
| The U-751/M-686 XY stage is features ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The... | |
| The U-780 is a novel, low-profile precision positioning stage for high-resolution microscopes. It comes complete with a controller and joystick. The motorized stage is based on PI’s patented ultrasonic ceramic... | |
| The U-780/M-687 and U-751/M-686 XY stages are based on ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second... | |
| The V-141 linear stage family, developed by PI USA's engineering team, is the smallest and most economical among the new stages. Currently available with three travel ranges of 40mm, 60mm,... | |
| The V-408 stage is small, precise, and affordable as it's equipped with an incremental linear encoder for direct position measurement and a high-force 3-phase linear motor drive. It's well-suited for... | |
| The V-571 family of nanopositioning linear stages is specifically designed for applications requiring extreme accuracy and geometric performance. This nanopositioning stage excels with 0.5µm straightness and flatness per 50mm travel,... | |
| The V-574 linear stage family is a new series of high dynamics nanopositioners with excellent guiding precision, driven by frictionless linear motors.Excellent Guiding Precision - Geometric PerformanceEquipped with high-precision crossed-roller... | |
| This low profile, integrated XY linear table is available with stepper and servo motors. Driven by a ball screw and guided by precision anti-creep crossed roller bearings for higher stiffness... | |
| With the V-817, PI has a linear stage in its portfolio for industrial solutions that has a high load capacity and high dynamics. Its design is consistently geared to demanding... | |
| XY stage for the price-sensitive OEM market The M-971 is integrated into systems for inspection, lithography, or biomedical engineering and is optimized for optical microscopy. It was specially developed to... | |
| 10 kg Load Capacity 1 Nanometer Lateral Guiding Precision Resolution <1 Nanometer PICMA® High-Performance Multilayer Piezo Drives Fast Response 75 Micron Travel Range Direct Metrology with Capacitive Sensors for... | |
| 100 x 100 Micron Travel Range For XY Scanning & Positioning Parallel-Kinematics/ Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion Precision Flexure-Guiding System Integrated Capacitive Sensors for... | |
| 100 x 100 x 100 Micron Travel Range Very Compact: 44 x 44 x 44 mm 1 Nanometer Resolution Ideal for Fiber-Alignment and Photonics Packaging Applications Optional E-760 Controller Card... | |
| 3 Nanometer Design Resolution Closed-Loop ActiveDrive™ DC Motor 12 kg Load Capacity (Self Locking), High Stiffness <100 Nanometer Minimum Incremental Motion 12.5 mm (1/2") Travel Range Choice of Motion Controllers... | |
| 6 motion axes: 3 × linear, 3 × rotational Travel ranges to 200 µm linear and to 1 mrad tilt angle Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology... | |
| Closed-Loop ActiveDrive™ DC Motor Travel Range 12.5 mm (1/2") Ultra-High-Resolutio n Encoder Choice of Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ball screws Non-Contact Origin and... | |
| Closed-Loop Motor Provides Smooth Motion and High Speed to 50 mm/s Travel Ranges 25 x 25mm Integrated Linear Encoders with 0.5µm Resolution 30mm Compact Height Mounts Directly to Microscopes Self-Locking... | |
| Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY,... | |
| Compact, High Precision Stage Stepper Motor and DC Motor Options 1, 2 and 4” Travel (26mm, 52mm and 102mm Repeatability to 0.05 µm Linear Encoder Option Direction-Sensing Home Switch Optical... | |
| Extremely Compact Open and Closed-Loop Piezo Drives for Nanometer Precision X, XY and XYZ Combinations and Rotation | |
| Fast scanning and positioning Travel ranges 5 mm, 10 mm, 20 mm Scanning frequencies of more than 10 Hz Max. velocity 250 mm/s crossed roller bearings for the highest precision... | |
| Fastest settling time under 5 ms with microscope objective Travel range 18 µm Scans and positions objectives with sub-nm resolution Parallel flexure guiding for minimized objective offset Direct metrology with... | |
| High dynamics, to 5 ms settling time Travel range up to 40 µm Resolution to 0.2 nm Compact design with low profile, 40 mm x 40 mm x 6 mm... | |
| High-Speed Piezo Z-Motion with Travel Ranges to 250 µm Nanometer Resolution Large Clear Aperture to Accommodate Specimen Holders Perfect Mechanical Fit to XY OEM Manual or Motorized Stages Sub-Millisecond Response... | |
| Higher Speed Through Direct Drive Up to 2.2 kHz Resonant Frequency in X and Y 30 x 30 or 30 x 30 x 10 Micron Travel Range 100 Picometers Resolution... | |
| Highest Stiffness from Parallel-Kinematic Design 100µm Travel in Compact Design (40x40x40 mm) Unidirectional repeatability <0.2nm Capacitative Sensors PICMA® High-Performance Multilayer Piezo Actuators Extremely Lighweight at 0.08kg Ideal for Fast... | |
| Ideal for Interlacing, CCD Resolution Enhancement Compact Size of only 45 x 45 x 6 mm Clear Aperture Low Cost - Efficient Design 15 x 15 Micron Travel Range Parallel... | |
| Load to 35g Velocity to 1m/s, Acceleration to 2g's Straightness/Flatnes s to 0.50µm | |
| Low Profile for Easy Integration: 20 mm (0.8") Large Aperture for 1x3"Slides. Accessories & Holders Available All Parts Black Anodized for Minimum Reflections 200µm Standard Travel Range, Longer Ranges Available... | |
| Motorized Positioning Range: 102 x 102 millimeters Maximum Load: 3 kg Maximum Velocity: 90 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.25 micrometers unidirectional +/- 0.5 micrometers bidirectional Linear... | |
| Motorized Positioning Range: 155 to 1016mm Maximum Load: 150 kg Maximum Velocity: 150 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.05 micrometers unidirectional +/- 0.04 micrometers bidirectional Linear Position... | |
| Motorized Positioning Range: 155 to 508 millimeters Direct Drive for High Speed Maximum Load: 25 kg Maximum Velocity: 500 mm/second Maximum Positioning Resolution: 0.015 micrometers Position Reproducibility: 0.05 micrometers unidirectional... | |
| Motorized Positioning Range: 155 to 508 millimeters Maximum Load: 100 kg Maximum Velocity: 200 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.05 micrometers unidirectional 0.1 micrometers bidirectional Linear Position... | |
| Motorized Positioning Range: 25 to 300 millimeters Maximum Load: 5 kg Maximum Velocity: 20 mm/second Maximum Positioning Resolution: 0.2 micrometers Position Reproducibility: 0.4 micrometers unidirectional +/ 10 micrometers bidirectional | |
| Motorized Positioning Range: 52 mm (2“), 102 mm (4“), 155 mm (6“) Maximum Load: 10 kg (22 lbs) Maximum Velocity: 45 mm/second Maximum Linear Encoder Resolution: 1 nanometer Minimum Incremental... | |
| Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 340 x 340 x 340 µm Capacitive Sensors for Highest Linearity Frictionless, High-Precision Flexure Guiding System Excellent Scanning... | |
| Precision Trajectory Control Parallel-Kinematics/ Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 Micron / 4 milliradian Clear Aperture 66 x 66 mm Direct Metrology with Capacitive Sensors... | |
| Radial and axial displacement Sub nanometer resolution Ideal for OEM applications Large choice of designs UHV-compatible to 10-9 hPa Piezo actuator / scanner tube Bipolar operating voltage up to... | |
| Small Footprint: 44 x 44 mm 100 Micron Travel Range Resolution to 0.2 Nanometer For Cost-Sensitive Applications PICMA® High-Performance Multilayer Piezo Actuators Open- and Closed-Loop Models | |
| Small Footprint: 44 x 44 mm 100 Micron Travel Range Resolution to 0.2 Nanometer For Cost-Sensitive Applications PICMA® High-Performance Multilayer Piezo Actuators Z-Stage also Available | |
| Stable platform for P-545 PInano® piezo Nano positioning systems Low profile for easy integration: 30 mm Travel range 25 mm × 25 mm Micrometer screws, motor upgrade available For inverted... | |
| Step-and-settle to 5 ms Low profile for easy integration Travel range 100 µm or 200 µm Clear aperture 93 mm × 65 mm Compatible with MetaMorph imaging software Cost-efficient due... | |
| Travel range 100 µm Resolution to 0.2 nm Linearity error 0.2 % Compact: Footprint 60 mm x 60 mm Very cost-effective controller / piezo mechanics systems Frictionless, high-precision flexure guiding... | |
| Travel Range from 26 to 102 mm (1” to 4”) Position Repeatability to 0.2 microns Velocity Up to 20mm/sec Load Capacity to 10kg (22lbs) Integrated Optical Limit Switch | |
| Travel Ranges from 25 to 300 mm Cost-Effective Design Modular System with 4 Series: M-403, M-404, M-413, M-414 Preloaded Leadscrews or Recirculating Ball Screws Stress-Relieved Aluminum Base 80 and 120... | |
| Travel ranges to 1016 mm (40") Velocity to 800 mm/s Incremental encoder with 15 nm resolution 480 N peak force Reference-class linear stage High travel accuracy with recirculating ball bearings. | |
| Travel ranges to 230 mm Velocity up to 0.5 m/s Absolute encoder with 1 nm resolution Excellent guiding accuracy Compact design with 160 mm width Reference-class linear stage Thanks to... | |
| Ultra-Fast Response Ultra-Precise Trajectory Control Digital Controllers with Fast FiberLink Interface Available ID-Chip for AutoCalibrate Function Direct-Metrology Capacitive Sensors for Highest Precision 0.1 nm Resolution PICMA® High-Performance Multilayer Piezo... | |
| Ultraprecision: 2 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution Long travel ranges: 13 mm, 26 mm or 52 mm Self-locking when switched off: Saves energy... | |
| Unique Design: Both Piezo-Stage and Piezo Actuator Frictionless Precision Flexure Guiding System 0.05 nm Resolution Direct Metrology with Capacitive Sensors for Highest Precision Ultra-Fast Response, Very Compact PICMA® High-Performance... | |
| XYΘ, XYZ and XY Versions Precision Trajectory Control Parallel-Kinematics/ Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 Micron Clear Aperture to 66 x 66 mm PICMA® | |
| XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to... | |
| Z-Axis Travel to 400 Micron Low Profile Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision 0.02%... |