PI (Physik Instrumente) L.P. Datasheets for Piezoelectric Motors
Piezoelectric motors use a piezoelectric ceramic element to produce ultrasonic vibrations of an appropriate type in a stator structure. The consequent movement can either be rotational or linear depending on the design of the structure.
Piezoelectric Motors: Learn more
|Application fields Motion in strong magnetic fields and in a vacuum Industrial precision positioning Semiconductor technology Semiconductor tests Wafer inspection Lithography Nanoimprinting Nanometrology Suitable for sophisticated vacuum applications N-331.xxU PICMAWalk...|
|3 Travel Ranges from 25mm to 100mm Compact Design, Open and Closed-loop Available 0.02nm Resolution 60N (13lbs) Power-off Holding Force 50N (11lbs) Push/Pull Force Low Operating Voltage Self Locking, with...|