Travel range 100 µm
Resolution to 0.2 nm
Linearity error 0.2 %
Compact: Footprint 60 mm x 60 mm
Very cost-effective controller / piezo mechanics systems
Frictionless, high-precision flexure guiding system
Outstanding lifetime due to PICMA® piezo actuators
Travel range 100 µm
Resolution to 0.2 nm
Linearity error 0.2 %
Compact: Footprint 60 mm x 60 mm
Very cost-effective controller / piezo mechanics systems
Frictionless, high-precision flexure guiding system
Outstanding lifetime due to PICMA® piezo actuators
