PI (Physik Instrumente) L.P. Datasheets for Capacitive Linear Position Sensors

Capacitive linear position sensors are devices that sense position / displacement using capacitance technology.
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Product Name Notes
PISeca Capacitive Sensor -- D-510 <1 Nanometer Resolution, Measuring Ranges to 500 µm Absolute, Non-Contact Measurement of Distance / Motion / Vibration Multi-Axis Measurements Possible Excellent Measuring Linearity to 0.1 % Plug & Play: Easy...
Capacitive Sensor -- D-015 / D-050 / D-100 For applications requiring highest precision Measurement range to 1000 µm Resolution to 0.01 nm Linearity error to 0.01 % with digital controller Bandwidth to 10 kHz Servo controller E-509.CxA, compatible...