Higher Speed Through Direct Drive
Up to 2.2 kHz Resonant Frequency in X and Y
30 x 30 or 30 x 30 x 10 Micron Travel Range
100 Picometers Resolution
Capacitive Sensors for Highest Linearity
Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
Active Runout Compensation
50 x 50 mm Clear Aperture
Frictionless Precision Flexure Guiding System
PICMA® High-Performance Multilayer Piezo Drives
Vacuum Compatible Option
Higher Speed Through Direct Drive
Up to 2.2 kHz Resonant Frequency in X and Y
30 x 30 or 30 x 30 x 10 Micron Travel Range
100 Picometers Resolution
Capacitive Sensors for Highest Linearity
Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
