PI (Physik Instrumente) L.P. PIHera XY Piezo Stage P-620.2 - P-629.2

  • PIHera XY Piezo Stage - P-620.2 - P-629.2 - PI (Physik Instrumente) L.P.
    PI (Physik Instrumente) L.P.
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PIHera XY Piezo Stage - P-620.2 - P-629.2 - PI (Physik Instrumente) L.P.
PI (Physik Instrumente) L.P.
Auburn, MA, United States
PIHera XY Piezo Stage
P-620.2 - P-629.2
PIHera XY Piezo Stage P-620.2 - P-629.2
XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions
  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
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Technical Specifications

  PI (Physik Instrumente) L.P.
Product Category Linear Slides and Linear Stages
Product Number P-620.2 - P-629.2
Product Name PIHera XY Piezo Stage
Axis Configuration X-Y Axes
Stroke or X-Axis Travel 50 to 1800 inch (1270 to 45720 mm)
Y-Axis Travel 50 to 1800 inch (1270 to 45720 mm)
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