Precision Trajectory Control
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron / 4 milliradian
Clear Aperture 66 x 66 mm
Direct Metrology with Capacitive Sensors for Highest Precision
PICMA® High-Performance Multilayer Piezo Drives
Precision Trajectory Control
Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron / 4 milliradian
Clear Aperture 66 x 66 mm
Direct Metrology with Capacitive Sensors for Highest Precision