PI (Physik Instrumente) L.P.
Multi-Axis Piezo Scanner
P-517 / P-527
PI (Physik Instrumente) L.P.
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Datasheet
Suppliers
XYθ, XYZ and XY Versions
Precision Trajectory Control
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron
Clear Aperture to 66 x 66 mm
PICMA® High-Performance Multilayer Piezo Drives
XYΘ, XYZ and XY Versions
Precision Trajectory Control
Parallel-Kinematics/
Travel Ranges to 200 Micron
Clear Aperture to 66 x 66 mm
PICMA® High-Performance Multilayer Piezo Drives
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Datasheet
Technical Specifications
Product Category
Linear Slides and Linear Stages
Product Number
P-517 / P-527
Product Name
Multi-Axis Piezo Scanner
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