Unique Design: Both Piezo-Stage and Piezo Actuator
Frictionless Precision Flexure Guiding System
0.05 nm Resolution
Direct Metrology with Capacitive Sensors for Highest Precision
Ultra-Fast Response, Very Compact
PICMA® High-Performance Multilayer Piezo Drives
ID-Chip for Auto Calibrate Function
Vacuum Versions Available
Unique Design: Both Piezo-Stage and Piezo Actuator
Frictionless Precision Flexure Guiding System
0.05 nm Resolution
Direct Metrology with Capacitive Sensors for Highest Precision
