PI (Physik Instrumente) L.P.
PIMars 6-Axis Piezo Stage System
P-562.6CD
-
PI (Physik Instrumente) L.P.
Request a Quote
Email Supplier
Datasheet
Suppliers
6 motion axes: 3 × linear, 3 × rotational
Travel ranges to 200 µm linear and to 1 mrad tilt angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent Scan-Flatness
Clear aperture 66 mm × 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV-compatible to 10-9 hPa
- 6 motion axes: 3 × linear, 3 × rotational
- Travel ranges to 200 µm linear and to 1 mrad tilt angle
- Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
- Highest linearity and stability with capacitive sensors
- Frictionless, high-precision flexure guiding system
- Excellent Scan-Flatness
- Clear aperture 66 mm × 66 mm
- Outstanding lifetime due to PICMA® piezo actuators
- UHV-compatible to 10-9 hPa
Supplier's Site
Datasheet
Technical Specifications
|
Product Category
|
Linear Slides and Linear Stages |
|
Product Number
|
P-562.6CD |
|
Product Name
|
PIMars 6-Axis Piezo Stage System |
|
Axis Configuration
|
X-Y-Z Axes
|
|
Stroke or X-Axis Travel
|
200 inch (5080 mm)
|
|
Y-Axis Travel
|
200 inch (5080 mm)
|
|
Z-Axis Travel
|
200 inch (5080 mm)
|
Unlock Full Specs
to access all available technical data
Similar Products
PI (Physik Instrumente) L.P.
Axis Configuration
X-Y Axes
Stroke or X-Axis Travel
25 inch (635 mm)
Y-Axis Travel
25 inch (635 mm)
View Details
PI (Physik Instrumente) L.P.
Axis Configuration
X Axis Only
Stroke or X-Axis Travel
25 to 50 inch (635 to 1270 mm)
Rated Speed
1.1 to 1.5 in/sec (1.68 to 2.29 m/min)
View Details
PI (Physik Instrumente) L.P.
Axis Configuration
X Axis Only
Stroke or X-Axis Travel
26 to 102 inch (660 to 2591 mm)
Rated Speed
3 to 20 in/sec (4.57 to 30.48 m/min)
View Details
