100 x 100 Micron Travel Range
For XY Scanning & Positioning
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
Precision Flexure-Guiding System
Integrated Capacitive Sensors for Resolution <0.3 Nanometer
50 x 50 mm Clear Aperture
Ultra-High Vacuum Version Available
Ultra-Fast XY and XYZ Versions Available
PICMA® High-Performance Multilayer Piezo Drives
100 x 100 Micron Travel Range
For XY Scanning & Positioning
Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
Precision Flexure-Guiding System
Integrated Capacitive Sensors for Resolution <0.3 Nanometer