PI (Physik Instrumente) L.P.
PIHera™ Family of Piezo-Z Nanopositioning Stages, Closed-Loop, Direct Metrology
P-620.Z · P-621.Z · P-622.Z
-
PI (Physik Instrumente) L.P.
Request a Quote
Email Supplier
Datasheet
Suppliers
Z-Axis Travel to 400 Micron
Low Profile
Resolution <1 Nanometer
Frictionless Precision Flexure Guiding System
PICMA® High-Performance Multilayer Piezo Drives
Direct Metrology with Capacitive Sensors for Highest Precision
0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible Versions
- Z-Axis Travel to 400 Micron
- Low Profile
- Resolution <1 Nanometer
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Multilayer Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
Supplier's Site
Datasheet
Technical Specifications
|
Product Category
|
Linear Slides and Linear Stages |
|
Product Number
|
P-620.Z · P-621.Z · P-622.Z |
|
Product Name
|
PIHera™ Family of Piezo-Z Nanopositioning Stages, Closed-Loop, Direct Metrology |
|
Axis Configuration
|
Z Axis Only
|
Unlock Full Specs
to access all available technical data
Similar Products
PI (Physik Instrumente) L.P.
Axis Configuration
Z Axis Only
Z-Axis Travel
12.5 inch (317 mm)
Rated Speed
0.5000 to 3 in/sec (0.7620 to 4.57 m/min)
View Details
PI (Physik Instrumente) L.P.
Axis Configuration
Z Axis Only
Stroke or X-Axis Travel
102 to 813 inch (2591 to 20650 mm)
Rated Speed
300 in/sec (457 m/min)
View Details
PI (Physik Instrumente) L.P.
Axis Configuration
X Axis Only
Stroke or X-Axis Travel
13 inch (330 mm)
Rated Speed
6 in/sec (9.14 m/min)
View Details
PI (Physik Instrumente) L.P.
Axis Configuration
Z Axis Only
Z-Axis Travel
100 to 150 inch (2540 to 3810 mm)
Features
Closed Loop Control
View Details
