PI (Physik Instrumente) L.P. Datasheets for Multi-axis Positioning Systems

Multi-axis positioning systems make use of linear, rotary and goniometric stages, slides and drives in various combinations to create standard and custom positioning systems.


Multi-axis Positioning Systems: Learn more

Product Name Notes
Precision-class XY stage PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy...
Reference-class microscope XY stage System with controller and joystick. Large clear aperture 160 mm × 110 mm. Suitable for the following inverted microscopes: Nikon Eclipse Ti-E/Ti-U/Ti-S Olympus IX2 Leica DMI...
Compact linear stage, versatile in use Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly...
F-131 is a unique two stage aligner and provides an especially versatile, compact and modular approach to building high-throughput nano-alignment processes. By combining compact precision motorized stages with a fast...
For applications that require smooth, precise, linear motion, the PIglide RB series linear air bearings are right for you. These bearings can easily replace ball bearing and crossed roller bearing...
For the highest precision applications, Nelson Air has developed a number of Planar XY air bearing stages. These systems use air bearings which ride directly on a granite or aluminum...
Piezo flexure stages provide sub-nanometer resolution, frictionless motion and very fast step and settle response. They are used in microscopy, imaging, semiconductor metrology and precision optics applications. PI provides a...
Robust and precise drives The XYZ setup of the fiber alignment system consists of three motorized linear stages from the M-122 series for linear motion, and the WT-85 and WT-100...
The A-341 PIglide HGS hybrid gantry system was developed for applications that require overhead motion and long travel ranges. The A-341 hybrid gantry has a unique hybrid guide design. The...
The M-110, M-111 and M-112 series is is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball...
The MGS gantry system has been designed to maximize throughput for applications requiring overhead motion. This stage is ideal for 3D printing, assembly, pick-and-place, alignment, inspection, and industrial automation applications.
The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as...
The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y...
The PIglide MTT series of manual alignment tabletops can manually adjust a payload mounted to a rotary air bearing in four degrees of freedom, allowing alignment of the payload to...
The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions. Two linear...
The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and...
The U-751/M-686 XY stage is features ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The...
The U-780 is a novel, low-profile precision positioning stage for high-resolution microscopes. It comes complete with a controller and joystick. The motorized stage is based on PI’s patented ultrasonic ceramic...
The U-780/M-687 and U-751/M-686 XY stages are based on ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second...
The XYZ setup of the fiber alignment system consists of three motorized linear stages from the M-122 series for linear motion, and the WT-85 and WT-100 goniometers for angular motion.
This low profile, integrated XY linear table is available with stepper and servo motors. Driven by a ball screw and guided by precision anti-creep crossed roller bearings for higher stiffness...
This low-profile integrated XY Table is equipped with ironless, non-cogging linear motors for smooth motion and high velocity to 200mm/sec. Equipped with linear encoders for direct position feedback, the stage...
XY stage for the price-sensitive OEM market The M-971 is integrated into systems for inspection, lithography, or biomedical engineering and is optimized for optical microscopy. It was specially developed to...
100 x 100 x 100 Micron Travel Range Very Compact: 44 x 44 x 44 mm 1 Nanometer Resolution Ideal for Fiber-Alignment and Photonics Packaging Applications Optional E-760 Controller Card...
300x300 to 500x1000mm XY travel 10kg load Absolute encoders, 1nm resolution Z-Stage options: linear motors or ball screws Dynamic error mapping 2m/sec max velocity (cross axis)
300x300 to 500x1000mm XY travel 10kg load Absolute encoders, 1nm resolution Z-Stage options: linear motors or ball screws Dynamic error mapping 2m/sec max velocity (cross axis) Parallel-kinematic design for six...
6 motion axes: 3 × linear, 3 × rotational Travel ranges to 200 µm linear and to 1 mrad tilt angle Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology...
Closed-Loop Motor Provides Smooth Motion and High Speed to 50 mm/s Travel Ranges 25 x 25mm Integrated Linear Encoders with 0.5µm Resolution 30mm Compact Height Mounts Directly to Microscopes Self-Locking...
Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY,...
For scanning and positioning in X, Y, Z, θX, θY, θZ 800 µm × 800 µm × 200 µm linear range Up to 1 mrad...
Higher Speed Through Direct Drive Up to 2.2 kHz Resonant Frequency in X and Y 30 x 30 or 30 x 30 x 10 Micron Travel Range 100 Picometers Resolution...
Highest Stiffness from Parallel-Kinematic Design 100µm Travel in Compact Design (40x40x40 mm) Unidirectional repeatability <0.2nm Capacitative Sensors PICMA® High-Performance Multilayer Piezo Actuators Extremely Lighweight at 0.08kg Ideal for Fast...
Load capacity to 1000 kg Velocity to 50 mm/s Repeatability to ±0.5 µm Travel ranges to 340 mm / 60° Scalable design: Dimensions, travel ranges, and loads Drive: brushless motors...
Load to 35g Velocity to 1m/s, Acceleration to 2g's Straightness/Flatness to 0.50µm
Low profile for easy integration: 16.5 mm Clear aperture 80 mm × 80 mm Travel range to 200 µm × 200 µm Enhanced responsiveness & multi-axis precision: Parallel kinematics /...
Low Profile for Easy Integration: 16.5 mm Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion Choice of Strain Gauge (Lower Cost)...
Low Profile for Easy Integration: 20 mm (0.8") Large Aperture for 1x3"Slides. Accessories & Holders Available All Parts Black Anodized for Minimum Reflections 200µm Standard Travel Range, Longer Ranges Available...
Miniature Design Optical Beam Deflection to 70mrad (4°) For Mirrors up to 25.4mm (1") Diameter Frictionless, High-Precision Flexure Guiding System Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy Factory...
Motorized Positioning Range: 102 x 102 millimeters Maximum Load: 3 kg Maximum Velocity: 90 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.25 micrometers unidirectional +/- 0.5 micrometers bidirectional Linear...
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 340 x 340 x 340 µm Capacitive Sensors for Highest Linearity Frictionless, High-Precision Flexure Guiding System Excellent Scanning...
Six degrees of freedom ±7 mm travel range in X and Y, and ±5 mm in Z ±7° rotation range in θX, θY, and ±8° in θZ 10 N load...
Small Footprint: 60 x 60 mm 100 x 100 Micron Travel Range Resolution to 0.8 Nanometer For Cost-Sensitive Applications Clear Aperture: 20 x 20 mm PICMA ® High-Performance Multilayer Piezo...
Stable platform for P-545 PInano® piezo Nano positioning systems Low profile for easy integration: 30 mm Travel range 25 mm × 25 mm Micrometer screws, motor upgrade available For inverted...
Travel range 200 µm High positional stability and resolution with capacitive sensors Small footprint with a 70 mm side length Large clear aperture 30 mm × 30 mm Precision-class Nano...
Ultra-high precision flexure joints Includes integrated scan algorithms for fiber optic alignment Actuator resolution 33 nm Repeatability 0.3 µm / 6 µrad Min. incremental motion 0.1 µm / 2 µrad...
XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to...