The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and provides 18mm travel. Two linear encoder versions are offered, featuring 0.6 and 0.1 microns resolution, respectively. The M-663's square footprint makes it suitable for use in compact XY configurations.
|PI (Physik Instrumente) L.P.|
|Product Category||Linear Slides and Linear Stages|
|Product Number||U-521 / M-663|
|Product Name||Miniature Stage, XY Combination, Ultrasonic Piezo Motor|
|Axis Configuration||X-Y Axes|
|Stroke or X-Axis Travel||19 inch (483 mm)|
|Rated Speed||400 in/sec (610 m/min)|