The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and provides 18mm travel. Two linear encoder versions are offered, featuring 0.6 and 0.1 microns resolution, respectively. The M-663's square footprint makes it suitable for use in compact XY configurations.
| PI (Physik Instrumente) L.P. | |
|---|---|
| Product Category | Linear Slides and Linear Stages |
| Product Number | U-521 / M-663 |
| Product Name | Miniature Stage, XY Combination, Ultrasonic Piezo Motor |
| Axis Configuration | X-Y Axes |
| Stroke or X-Axis Travel | 19 inch (483 mm) |
| Rated Speed | 400 in/sec (610 m/min) |
