Reference-class linear stage
High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).
Multi-axis combinations with the directly driven rotation stages of the UPR series.
Versions with DC servo motors or stepper motors are available with the same footprint.
Magnetic direct drive
Ironless magnetic direct drive for high velocity and acceleration. High position resolution.
Fields of application
Industry and research. Metrology, precision scanning in semiconductor or flat panel display manufacturing.
|PI (Physik Instrumente) L.P.|
|Product Category||Linear Slides and Linear Stages|
|Product Name||Linear Motor Stage|
|Axis Configuration||X Axis Only|
|Stroke or X-Axis Travel||305 to 1016 inch (7747 to 25806 mm)|
|Rated Speed||800 in/sec (1219 m/min)|
|Bearing Type||Ball/Roller Bearing|