PI (Physik Instrumente) L.P. Linear Motor Stage LMS-270

Travel ranges to 1016 mm (40") Velocity to 800 mm/s Incremental encoder with 15 nm resolution 480 N peak force Reference-class linear stage High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp). Multi-axis combinations with the directly driven rotation stages of the UPR series. Versions with DC servo motors or stepper motors are available with the same footprint. Magnetic direct drive Ironless magnetic direct drive for high velocity and acceleration. High position resolution. Fields of application Industry and research. Metrology, precision scanning in semiconductor or flat panel display manufacturing.