PI (Physik Instrumente) L.P. Q-Motion® Miniature Linear Stage Q-522

The Q-522 series of economical mini positioning stages are driven by a compact piezo inertia motor. They are offered with travel ranges of 1/4", 1/2", and 1". Featuring dimensions as small as 22x22x10mm, the Q-522 is one of the smallest precision linear stages available on the market. Q-522 stages can be combined with the Q-622 miniature rotary positioners to form very compact multi-axis positioning systems.

• Ultra Compact: 22x22x10mm (Open-Loop Version)
• 1nm and 4nm Resolution Available
• XY Configurations
• Combines with Q-522 Rotary Stage
• 1/4", 1/2", and 1" Travel Range
• 10mm/sec Max. Velocity
• Self-Clamping Stick-Slip Motor, No Jitter/Drift, No Holding Current
• UHV and Non-Magnetic Options

• Extremely Compact
• Open and Closed-Loop Piezo Drives for Nanometer Precision
• X, XY and XYZ Combinations and Rotation