Edwards Vacuum Datasheets for High Vacuum Pumps

High and ultrahigh vacuum pumps operate efficiently in the high vacuum region and develop molecular flow for highly evacuated systems.
High Vacuum Pumps: Learn more

Product Name Notes
nEXT Turbomolecular Pump -- nEXT240D
nEXT Turbomolecular Pump -- nEXT300D
nEXT Turbomolecular Pump -- nEXT400D
Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP...
STP Turbomolecular Pump -- STP-L301 Edwards STP-L301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility.
STP Turbomolecular Pump -- STP301
STP Turbomolecular Pump -- STP301C
Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major...
STPA Turbomolecular Pump -- STPA2203C Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack...
Standard Diffstak Vapor Pump -- 100/300M
Standard Diffstak Vapor Pump -- 100/300P
Standard Diffstak Vapor Pump -- 160/700M
Standard Diffstak Vapor Pump -- 160/700P
Standard Diffstak Vapor Pump -- 250/2000M
Standard Diffstak Vapor Pump -- 250/2000P
Standard Diffstak Vapor Pump -- 63/150M
Standard Diffstak Vapor Pump -- 63/150P
Unvalved Diffstak Vapor Pump -- 100/300C
Unvalved Diffstak Vapor Pump -- 100/300F
Unvalved Diffstak Vapor Pump -- 160/700C
Unvalved Diffstak Vapor Pump -- 160/700F
Unvalved Diffstak Vapor Pump -- 250/2000C
Unvalved Diffstak Vapor Pump -- 63/150C
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required...
Cryo Cooled Diffstak Vapor Pump -- CR100/300M
Cryo Cooled Diffstak Vapor Pump -- CR100/300P
Cryo Cooled Diffstak Vapor Pump -- CR160/700M
Cryo Cooled Diffstak Vapor Pump -- CR160/700P
Cryo Cooled Diffstak Vapor Pump -- CR250/2000M
Cryo Cooled Diffstak Vapor Pump -- CR250/2000P
Cryo Cooled Diffstak Vapor Pump -- CR63/150M
Cryo Cooled Diffstak Vapor Pump -- CR63/150P
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a...
Vapor Booster Pump -- 18B4B The Edwards 18B4B vapour booster pumps offer higher pumping speeds, of up to 6000 l s-1 at pressures intermediate between mechanical boosters and diffusion pumps. Vapor boosters from Edwards have...
Vapor Booster Pump -- 30B5M The Edwards 30B5M vapor booster pumps offer higher pumping speeds, of up to 15000 l s-1 at pressures intermediate between mechanical boosters and diffusion pumps. Vapor boosters from Edwards have...
EXT Compound Turbomolecular Vacuum Pump -- EXT556H The EXT556H incorporates our hybrid bearing and enhanced molecular drag pumping technologies with turbomolecular pump stages on a single rotor. The result is a highly reliable pump well suited to...
EXT Compound Turbomolecular Vacuum Pump -- EXT75DX The EXT75DX compound turbomolecular pumps combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of...
HT Series -- HT10 The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT10 (ANSI10/ISO320 inlet) diffusion pump is designed for all...
HT Series -- HT16B The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT16B (ANSI16/ISO5000 inlet) diffusion pump is designed for all...
HT Series -- HT20B The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT20B (ANSI20/ISO630 inlet) diffusion pump is designed for all...
Air Cooled Diffusion Pump -- EO50/60 The model EO50/60 is a compact, fast warm-up air-cooled diffusion pump supplied complete with high integrity inlet Co-Seal, flange clamping ring and optional baffle. The jet assembly is removable for...
EPX On-tool High Vacuum Pump -- EPX180L
EPX On-tool High Vacuum Pump -- EPX180LE
EPX On-tool High Vacuum Pump -- EPX180N
EPX On-tool High Vacuum Pump -- EPX180NE
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to...
EPX On-tool High Vacuum Pump -- EPX500L
EPX On-tool High Vacuum Pump -- EPX500LE
EPX On-tool High Vacuum Pump -- EPX500N
EPX On-tool High Vacuum Pump -- EPX500NE
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to...
STPA Turbomolecular Pump -- STPA2503C
STPA Turbomolecular Pump -- STPA3003C
The new Edwards STPA2503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor...
STPA Turbomolecular Pump -- STPA3503C The new Edwards STPA3503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor...
STPA Turbomolecular Pump -- STPA1603C The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by...
STP-XA Turbomolecular Pump -- STP-XA2703C The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on...
STP-XA Turbomolecular Pump -- STP-XA3203C The STP-XA3203C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on...