Edwards Vacuum Datasheets for High Vacuum Pumps
High and ultrahigh vacuum pumps operate efficiently in the high vacuum region and develop molecular flow for highly evacuated systems.
High Vacuum Pumps: Learn more
| Product Name | Notes |
|---|---|
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nEXT Turbomolecular Pump -- nEXT240D
nEXT Turbomolecular Pump -- nEXT300D nEXT Turbomolecular Pump -- nEXT400D |
Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP... |
| STP Turbomolecular Pump -- STP-L301 | Edwards STP-L301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. |
|
STP Turbomolecular Pump -- STP301
STP Turbomolecular Pump -- STP301C |
Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major... |
| STPA Turbomolecular Pump -- STPA2203C | Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack... |
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Standard Diffstak Vapor Pump -- 100/300M
Standard Diffstak Vapor Pump -- 100/300P Standard Diffstak Vapor Pump -- 160/700M Standard Diffstak Vapor Pump -- 160/700P Standard Diffstak Vapor Pump -- 250/2000M Standard Diffstak Vapor Pump -- 250/2000P Standard Diffstak Vapor Pump -- 63/150M Standard Diffstak Vapor Pump -- 63/150P Unvalved Diffstak Vapor Pump -- 100/300C Unvalved Diffstak Vapor Pump -- 100/300F Unvalved Diffstak Vapor Pump -- 160/700C Unvalved Diffstak Vapor Pump -- 160/700F Unvalved Diffstak Vapor Pump -- 250/2000C Unvalved Diffstak Vapor Pump -- 63/150C |
The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required... |
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Cryo Cooled Diffstak Vapor Pump -- CR100/300M
Cryo Cooled Diffstak Vapor Pump -- CR100/300P Cryo Cooled Diffstak Vapor Pump -- CR160/700M Cryo Cooled Diffstak Vapor Pump -- CR160/700P Cryo Cooled Diffstak Vapor Pump -- CR250/2000M Cryo Cooled Diffstak Vapor Pump -- CR250/2000P Cryo Cooled Diffstak Vapor Pump -- CR63/150M Cryo Cooled Diffstak Vapor Pump -- CR63/150P |
The Diffstak design has been proven over many years with thousands of pumps installed. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a... |
| Vapor Booster Pump -- 18B4B | The Edwards 18B4B vapour booster pumps offer higher pumping speeds, of up to 6000 l s-1 at pressures intermediate between mechanical boosters and diffusion pumps. Vapor boosters from Edwards have... |
| Vapor Booster Pump -- 30B5M | The Edwards 30B5M vapor booster pumps offer higher pumping speeds, of up to 15000 l s-1 at pressures intermediate between mechanical boosters and diffusion pumps. Vapor boosters from Edwards have... |
| EXT Compound Turbomolecular Vacuum Pump -- EXT556H | The EXT556H incorporates our hybrid bearing and enhanced molecular drag pumping technologies with turbomolecular pump stages on a single rotor. The result is a highly reliable pump well suited to... |
| EXT Compound Turbomolecular Vacuum Pump -- EXT75DX | The EXT75DX compound turbomolecular pumps combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of... |
| HT Series -- HT10 | The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT10 (ANSI10/ISO320 inlet) diffusion pump is designed for all... |
| HT Series -- HT16B | The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT16B (ANSI16/ISO5000 inlet) diffusion pump is designed for all... |
| HT Series -- HT20B | The HT high throughput series is the pinnacle of our diffusion pump knowledge with technology aimed specifically at industrial users. Edwards HT20B (ANSI20/ISO630 inlet) diffusion pump is designed for all... |
| Air Cooled Diffusion Pump -- EO50/60 | The model EO50/60 is a compact, fast warm-up air-cooled diffusion pump supplied complete with high integrity inlet Co-Seal, flange clamping ring and optional baffle. The jet assembly is removable for... |
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EPX On-tool High Vacuum Pump -- EPX180L
EPX On-tool High Vacuum Pump -- EPX180LE EPX On-tool High Vacuum Pump -- EPX180N EPX On-tool High Vacuum Pump -- EPX180NE |
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to... |
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EPX On-tool High Vacuum Pump -- EPX500L
EPX On-tool High Vacuum Pump -- EPX500LE EPX On-tool High Vacuum Pump -- EPX500N EPX On-tool High Vacuum Pump -- EPX500NE |
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to... |
|
STPA Turbomolecular Pump -- STPA2503C
STPA Turbomolecular Pump -- STPA3003C |
The new Edwards STPA2503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor... |
| STPA Turbomolecular Pump -- STPA3503C | The new Edwards STPA3503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor... |
| STPA Turbomolecular Pump -- STPA1603C | The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by... |
| STP-XA Turbomolecular Pump -- STP-XA2703C | The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on... |
| STP-XA Turbomolecular Pump -- STP-XA3203C | The STP-XA3203C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. This pump is based on... |