The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.
| Edwards Vacuum | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | STPA1603C |
| Product Name | STPA Turbomolecular Pump |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications |
| Features | Magnetic Bearing |
| Ultimate Vacuum | 7.50E-8 torr (29.92 in Hg vac) |
| Pumping Speed | 2543 to 3390 CFM (4324 to 5766 m³/hr) |
