Edwards Vacuum EPX On-tool High Vacuum Pump EPX500LE

Description
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.
  • EPX On-tool High Vacuum Pump - EPX500LE - Edwards Vacuum
    Edwards Vacuum
Description
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.

Suppliers

Company
Product
Description
Supplier Links
EPX On-tool High Vacuum Pump - EPX500LE - Edwards Vacuum
Edwards Vacuum
Crawley, West Sussex, United Kingdom
EPX On-tool High Vacuum Pump
EPX500LE
EPX On-tool High Vacuum Pump EPX500LE
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.
Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.
The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.

Supplier's Site

Technical Specifications

  Edwards Vacuum
Product Category High Vacuum Pumps
Product Number EPX500LE
Product Name EPX On-tool High Vacuum Pump
Configuration Individual Vacuum Pump
Application Semiconductor
Ultimate Vacuum 7.50E-7 torr (29.92 in Hg vac)
Pumping Speed 294 CFM (500 m³/hr)
UHV / High Vacuum Molecular Drag
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