The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.
Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20 lighter, 30 smaller and requires 40 less power than the IPX.
| Edwards Vacuum | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | EPX180LE |
| Product Name | EPX On-tool High Vacuum Pump |
| Configuration | Individual Vacuum Pump |
| Application | Semiconductor |
| Ultimate Vacuum | 7.50E-5 torr (29.92 in Hg vac) |
| Pumping Speed | 99.96 CFM (170 m³/hr) |
| UHV / High Vacuum | Molecular Drag |
