The new Edwards STPA2503C turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. The enhanced rotor design, half rack controller and battery free d.c. drive operation provide considerable space saving and class leading performance. The STPA2503C has been qualified on major 300 mm metal and poly etch processes.
| Edwards Vacuum | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | STPA2503C |
| Product Name | STPA Turbomolecular Pump |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Scientific; Semiconductor |
| Features | Magnetic Bearing |
| Ultimate Vacuum | 7.50E-9 torr (29.92 in Hg vac) |
| Pumping Speed | 3390 to 5297 CFM (5766 to 9009 m³/hr) |
