The EXT75DX compound turbomolecular pumps combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible without TIC controllers.
| Edwards Vacuum | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | EXT75DX |
| Product Name | EXT Compound Turbomolecular Vacuum Pump |
| Configuration | Individual Vacuum Pump |
| Application | Ultrahigh Vacuum Applications |
| Features | Magnetic Bearing |
| Ultimate Vacuum | 3.75E-8 to 3.75E-10 torr (29.92 to 29.92 in Hg vac) |
| Pumping Speed | 88.99 to 140 CFM (151 to 238 m³/hr) |
