The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Edwards Diffstak 63 (ISO 63 inlet) design has been proven over many years with thousands of pumps installed. This pump has a pneumatically actuated high vacuum isolation valve and is supplied with: NW10 elbow, NW10 centering-ring, NW10 clamp, water pipe couplings and ferrules, inlet ISO 63 Co-Seal.
| Edwards Vacuum | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | 63/150P |
| Product Name | Standard Diffstak Vapor Pump |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Thin Film, Surface Physics UHV Apps |
| Pumping Speed | 286 to 424 CFM (486 to 721 m³/hr) |
| UHV / High Vacuum | Diffusion or Vapor |
