Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for battery-free operation. The STPA2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.
| Edwards Vacuum | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | STPA2203C |
| Product Name | STPA Turbomolecular Pump |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Chemical; Semiconductor; Ultrahigh Vacuum Applications |
| Features | Magnetic Bearing |
| Ultimate Vacuum | 7.50E-7 torr (29.92 in Hg vac) |
| Pumping Speed | 3602 to 4662 CFM (6126 to 7928 m³/hr) |
