The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.
Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.
| Edwards Vacuum | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | EPX500L |
| Product Name | EPX On-tool High Vacuum Pump |
| Configuration | Individual Vacuum Pump |
| Application | Semiconductor |
| Ultimate Vacuum | 7.50E-7 torr (29.92 in Hg vac) |
| Pumping Speed | 294 CFM (500 m³/hr) |
| UHV / High Vacuum | Molecular Drag |
