CoorsTek Datasheets for Carbides and Carbide Materials (hardmetals)

Carbides and carbide materials (hardmetals) have excellent wear resistance and high hot hardness. They are binary compounds of carbon and an element of lower or comparable electronegativity.
Carbides and Carbide Materials (hardmetals): Learn more

Product Name Notes
Boron carbide (B4C) is one of the world's hardest manufactured materials. Its strong chemical bonds and hard surface minimize wear in rigorous environments. Boron carbides are often used in ballistic...
Cantilever paddles are used to position semiconductor wafer "boats" or carriers within process tubes, furnace reactors, and other thermal systems. Ceramic cantilever paddles insert and withdraw wafer carriers in process...
Chamber domes (sometimes referred to as lids) are used to create a clean, inert, and protected environment in deposition chambers. Chemical reactions inside the chamber deposit thin layers of metallic,...
CoorsTek advanced, high-purity ceramic components are built to withstand the extreme environments in plasma etch (or "dry" etch) chambers — including vapor phase chemical etchants, high voltage RF (radio frequency)...
CoorsTek ceramic components are used in heating, ventilation, and air conditioning (HVAC) applications. We manufacture sensors, igniters, tubes and rods, and other critical-duty components. Ceramic-based sensors provide precise, reliable feedback...
CoorsTek is helping lead the solar industry both in manufacturing and in the field. Manufacturing CoorsTek produces recrystallized silicon carbide systems for solar wafer manufacturing, optimizing entire horizontal furnace systems.
CoorsTek manufactures lightweight, superior ballistic performance ceramic components for armor integration. Each product is made of next-generation materials, shapes, and sizes for use in body, ground vehicle, aircraft, and marine...
CoorsTek offers a wide variety of tubes and rods manufactured from high-performance technical ceramic materials, including alumina, zirconia, and silicon carbide. Enhance performance and product life by using the material...
CoorsTek provides precision measurement components for clean, stable, and contaminant-free performance across temperature and application environments. Ceramic Components for Ion Implant Equipment From precision air bearing components and beams to...
CoorsTek provides some of the lightest armor components by developing specialty materials and processes for superior ballistic performance with minimal weight. Our lightweight technical ceramic tiles employ tight-tolerance manufacturing standards,...
CoorsTek provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. Advanced ceramics deliver excellent thermal resistance and plasma durability while mitigating particles and...
CoorsTek supplies custom ceramic armor components for use in vehicle protection systems. Our lightweight materials help to increase efficiency while meeting or exceeding the performance of traditional steel-based systems. Advanced...
CoorsTek technical ceramics exhibit long-lasting wear in the most abrasive environments. Our advanced technical ceramics offer higher strength and corrosion resistance than traditional wear materials. Let our wear design experts...
CoorsTek ultra-precise Cerbec® Bearing Balls are ideal for use in wind turbines, available in up to 50 mm diameters. The inherent dielectric properties of silicon nitride (Si3N4) provide electrical insulation...
End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally...
Focus/edge rings are designed to improve etch uniformity around the wafer edge or perimeter. When used with an electrostatic chuck (e-chuck), the wafer rests on the edge focus ring -...
From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature...
Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability...
NEXT-GENERATION CERAMIC TORSO PLATES For over three decades, CoorsTek has worked with top armor integrators to develop the next-generation of advanced ceramic body armor components. Superior Protection Using Next-Generation Ceramic...
Precision ceramic components improve durability and handling of wafer stages and tables used during inspection and processing. CoorsTek components and tables provide precise dimensional stability, ultra-flatness and smoothness, and vacuum...
Pressureless sintered boron carbide combines high purity and the excellent mechanical properties of boron carbide for use in both ballistic armor and semiconductor manufacturing. Example Applications Ballistic armor components Neutron...
Process tubes are used in the reaction zones of semiconductor furnaces - requiring high purity and thermal stability. Some processing equipment uses liners within the process tubes. Smaller, traditional process...
Rings cover the wafer edge and perimeter, protecting critical chamber components and extending their useful life. Since they are directly exposed to the deposition process, strong plasma durability and high...
Semiconductor deposition processes use a combination of volatile precursor gases, plasma, and high temperature to layer high quality thin films onto wafers. Deposition chambers and wafer handling tools need durable...
Silicon Carbides (SiC) exhibit characteristically high hardness, wear resistance, corrosion resistance, and strength — even at high temperatures. CoorsTek has engineered a variety of silicon carbide processes and compositions which...
Susceptors hold and heat semiconductor wafers during thermal processing. A susceptor is made of a material which absorbs energy by induction, conduction, and/or radiation and heats the wafer. Its thermal...
Tungsten Carbide (WC) is a tough, high-density ceramic often used in severe service applications. Tungsten carbides are commonly known for use in high-quality tooling inserts. Due to its high-temperature tolerance,...
Windows are chamber lids designed to transmit RF (radio frequency) and microwave energy into the plasma etch chamber while resisting erosion from the harsh plasma etch environment. An effective window...