CoorsTek Datasheets for Wafer Chucks

Wafer chucks are used to handle semiconductor wafers during wafer processing applications. Common work clamping technologies include vacuum and electrostatic.
Wafer Chucks: Learn more

Product Name Notes
Ultra-Flat Ceramic Vacuum Wafer Chucks Our ultra-flat ceramic vacuum wafer chucks, stepper chucks, porous chucks, and electrostatic chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize the risk of back-side particles for sensitive...