From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature of ion implant processes. CoorsTek provides advanced, RF-transparent ceramic components for high-performance ion implant equipment.
Recommended Materials for Ion Implant Processing
PlasmaPure™ UC Ultra-Pure Alumina
PureSiC® Ultra-Pure CVD Silicon Carbide
StatSafe™ ESD-Safe Ceramics
From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature of ion implant processes. CoorsTek provides advanced, RF-transparent ceramic components for high-performance ion implant equipment.
Recommended Materials for Ion Implant Processing
- PlasmaPure™ UC Ultra-Pure Alumina
- PureSiC® Ultra-Pure CVD Silicon Carbide
- StatSafe™ ESD-Safe Ceramics
