CoorsTek provides precision measurement components for clean, stable, and contaminant-free performance across temperature and application environments.
Ceramic Components for Ion Implant Equipment
From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature of ion implant processes. CoorsTek provides advanced, RF-transparent ceramic components for high-performance ion implant equipment.
Recommended Materials for Ion Implant Processing
PlasmaPure™ UC Ultra-Pure Alumina
PureSiC® Ultra-Pure CVD Silicon Carbide
StatSafe™ ESD-Safe Ceramics
Ceramic Scale Mounts for Ion Implant Equipment
Electronics or semiconductors; Ion Implant Equipment