CoorsTek Datasheets for Silicon Carbide and Silicon Carbide Ceramics

Silicon carbide and silicon carbide ceramics are black, high-strength materials with higher hardness and better thermal shock resistance than alumina. They have superior properties for power devices and are predicted to revolutionize the power electronics industry. These hard ceramics consist of grains of silicon carbide which can be bonded together by sintering.
Silicon Carbide and Silicon Carbide Ceramics: Learn more

Product Name Notes
Paddles For Diffusion & LPCVD Equipment Cantilever paddles are used to position semiconductor wafer "boats" or carriers within process tubes, furnace reactors, and other thermal systems. Ceramic cantilever paddles insert and withdraw wafer carriers in process...
Ceramic Chamber Lids for Deposition Chambers Chamber domes (sometimes referred to as lids) are used to create a clean, inert, and protected environment in deposition chambers. Chemical reactions inside the chamber deposit thin layers of metallic,...
Ceramic Components for Plasma Etch Equipment CoorsTek advanced, high-purity ceramic components are built to withstand the extreme environments in plasma etch (or "dry" etch) chambers — including vapor phase chemical etchants, high voltage RF (radio frequency)...
HVAC Ceramic Components CoorsTek ceramic components are used in heating, ventilation, and air conditioning (HVAC) applications. We manufacture sensors, igniters, tubes and rods, and other critical-duty components. Ceramic-based sensors provide precise, reliable feedback...
Ceramic Solar Cell Components CoorsTek is helping lead the solar industry both in manufacturing and in the field. Manufacturing CoorsTek produces recrystallized silicon carbide systems for solar wafer manufacturing, optimizing entire horizontal furnace systems.
Armor-Grade Ceramics For Superior Armor Systems -- Cerashield™ SC-DS
Armor-Grade Ceramics For Superior Armor Systems -- Cerashield™ SC-RB
Armor-Grade Ceramics For Superior Armor Systems -- Cercom® PAD B4C-SiC
Armor-Grade Ceramics For Superior Armor Systems -- Cercom® PAD SiC X-1
Armor-Grade Ceramics For Superior Armor Systems -- Cercom® PAD SiC-B4C
Armor-Grade Ceramics For Superior Armor Systems -- Cercom® PAD SiC-N
CoorsTek manufactures lightweight, superior ballistic performance ceramic components for armor integration. Each product is made of next-generation materials, shapes, and sizes for use in body, ground vehicle, aircraft, and marine...
Ceramic Tubes &Rods CoorsTek offers a wide variety of tubes and rods manufactured from high-performance technical ceramic materials, including alumina, zirconia, and silicon carbide. Enhance performance and product life by using the material...
Ceramic Scale Mounts for Ion Implant Equipment CoorsTek provides precision measurement components for clean, stable, and contaminant-free performance across temperature and application environments. Ceramic Components for Ion Implant Equipment From precision air bearing components and beams to...
Ceramic Armor Panels for Aircraft -- Cerashield™ CoorsTek provides some of the lightest armor components by developing specialty materials and processes for superior ballistic performance with minimal weight. Our lightweight technical ceramic tiles employ tight-tolerance manufacturing standards,...
Wafer Boats For Diffusion & LPCVD Equipment CoorsTek provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. Advanced ceramics deliver excellent thermal resistance and plasma durability while mitigating particles and...
Ceramic Ballistic Door Panel Armor -- Cerashield™ CoorsTek supplies custom ceramic armor components for use in vehicle protection systems. Our lightweight materials help to increase efficiency while meeting or exceeding the performance of traditional steel-based systems. Advanced...
Ceramic Wear Components and Tiles CoorsTek technical ceramics exhibit long-lasting wear in the most abrasive environments. Our advanced technical ceramics offer higher strength and corrosion resistance than traditional wear materials. Let our wear design experts...
Ceramic Wind Power Components CoorsTek ultra-precise Cerbec® Bearing Balls are ideal for use in wind turbines, available in up to 50 mm diameters. The inherent dielectric properties of silicon nitride (Si3N4) provide electrical insulation...
Semiconductor Wafer End Effectors End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally...
Ceramic Focus Rings for Plasma Etch Equipment Focus/edge rings are designed to improve etch uniformity around the wafer edge or perimeter. When used with an electrostatic chuck (e-chuck), the wafer rests on the edge focus ring -...
Ceramic Components for Ion Implant Equipment From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature...
Ceramic Lift Pins Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability...
Ceramic Body Armor Components -- Cerashield™ NEXT-GENERATION CERAMIC TORSO PLATES For over three decades, CoorsTek has worked with top armor integrators to develop the next-generation of advanced ceramic body armor components. Superior Protection Using Next-Generation Ceramic...
Ceramic Components For Wafer Stages and Tables Precision ceramic components improve durability and handling of wafer stages and tables used during inspection and processing. CoorsTek components and tables provide precise dimensional stability, ultra-flatness and smoothness, and vacuum...
Process Tubes For Diffusion & LPCVD Equipment Process tubes are used in the reaction zones of semiconductor furnaces - requiring high purity and thermal stability. Some processing equipment uses liners within the process tubes. Smaller, traditional process...
Ceramic Chamber Rings for Deposition Chambers Rings cover the wafer edge and perimeter, protecting critical chamber components and extending their useful life. Since they are directly exposed to the deposition process, strong plasma durability and high...
Ceramic Deposition Equipment Components Semiconductor deposition processes use a combination of volatile precursor gases, plasma, and high temperature to layer high quality thin films onto wafers. Deposition chambers and wafer handling tools need durable...
Chemical Vapor Deposition (CVD) Silicon Carbide -- PureSiC™
Direct-Sintered Silicon Carbide -- UltraSiC™
Hot Pressed Silicon Carbide
Liquid Phase Sintered Silicon Carbide
Reaction Bonded Silicon Carbide
Recrystallized Silicon Carbide -- UltraClean™
Silicon Carbides (SiC) exhibit characteristically high hardness, wear resistance, corrosion resistance, and strength — even at high temperatures. CoorsTek has engineered a variety of silicon carbide processes and compositions which...
Ceramic Susceptors For Semiconductor Processing Susceptors hold and heat semiconductor wafers during thermal processing. A susceptor is made of a material which absorbs energy by induction, conduction, and/or radiation and heats the wafer. Its thermal...
Ceramic Etch Windows for Plasma Etch Equipment Windows are chamber lids designed to transmit RF (radio frequency) and microwave energy into the plasma etch chamber while resisting erosion from the harsh plasma etch environment. An effective window...